6/25/2010	12:08:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	12:08:11 AM	Recipe started at 12:08 AM
6/25/2010	12:08:11 AM	Helium valve closed
6/25/2010	12:08:11 AM	H2 valve closed
6/25/2010	12:08:11 AM	BCl3 valve closed
6/25/2010	12:08:11 AM	PH3 valve closed
6/25/2010	12:08:11 AM	SiCl4 pre valve closed
6/25/2010	12:08:11 AM	SiCl4 post valve closed
6/25/2010	12:08:11 AM	Main Vac valve closed
6/25/2010	12:08:11 AM	Bubbler valve closed
6/25/2010	12:08:11 AM	Bypass valve opened
6/25/2010	12:08:11 AM	Helium MFC set to  0.000000
6/25/2010	12:08:11 AM	H2 MFC set to  0.000000
6/25/2010	12:08:11 AM	BCl3 MFC set to  0.000000
6/25/2010	12:08:11 AM	PHl3 MFC set to  0.000000
6/25/2010	12:08:11 AM	SiCl4 MFC set to  0.000000
6/25/2010	12:08:11 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	12:08:11 AM	Tube furnace set to 0
6/25/2010	12:08:11 AM	Helium valve closed
6/25/2010	12:08:11 AM	H2 valve closed
6/25/2010	12:08:11 AM	BCl3 valve closed
6/25/2010	12:08:11 AM	PH3 valve closed
6/25/2010	12:08:11 AM	SiCl4 pre valve closed
6/25/2010	12:08:11 AM	SiCl4 post valve closed
6/25/2010	12:08:11 AM	Bubbler valve closed
6/25/2010	12:08:11 AM	Main Vac valve opened
6/25/2010	12:08:11 AM	Bypass valve opened
6/25/2010	12:08:11 AM	Helium MFC set to  0.000000
6/25/2010	12:08:11 AM	H2 MFC set to  0.000000
6/25/2010	12:08:11 AM	BCl3 MFC set to  0.000000
6/25/2010	12:08:11 AM	PHl3 MFC set to  0.000000
6/25/2010	12:08:11 AM	SiCl4 MFC set to  0.000000
6/25/2010	12:08:11 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	12:08:11 AM	Tube furnace set to 0
6/25/2010	12:08:11 AM	Run finished at 12:08 AM
6/25/2010	12:08:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	12:09:58 AM	Helium MFC set to  100.000000
6/25/2010	12:09:59 AM	Helium valve opened
6/25/2010	12:20:19 AM	Helium valve closed
6/25/2010	12:20:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	12:20:21 AM	Recipe started at 12:20 AM
6/25/2010	12:20:21 AM	Helium valve closed
6/25/2010	12:20:21 AM	H2 valve closed
6/25/2010	12:20:21 AM	BCl3 valve closed
6/25/2010	12:20:21 AM	PH3 valve closed
6/25/2010	12:20:21 AM	SiCl4 pre valve closed
6/25/2010	12:20:21 AM	SiCl4 post valve closed
6/25/2010	12:20:21 AM	Main Vac valve closed
6/25/2010	12:20:21 AM	Bubbler valve closed
6/25/2010	12:20:21 AM	Bypass valve opened
6/25/2010	12:20:21 AM	Helium MFC set to  0.000000
6/25/2010	12:20:21 AM	H2 MFC set to  0.000000
6/25/2010	12:20:21 AM	BCl3 MFC set to  0.000000
6/25/2010	12:20:21 AM	PHl3 MFC set to  0.000000
6/25/2010	12:20:21 AM	SiCl4 MFC set to  0.000000
6/25/2010	12:20:21 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	12:20:21 AM	Tube furnace set to 0
6/25/2010	12:20:21 AM	Helium valve closed
6/25/2010	12:20:21 AM	H2 valve closed
6/25/2010	12:20:21 AM	BCl3 valve closed
6/25/2010	12:20:21 AM	PH3 valve closed
6/25/2010	12:20:21 AM	SiCl4 pre valve closed
6/25/2010	12:20:21 AM	SiCl4 post valve closed
6/25/2010	12:20:21 AM	Bubbler valve closed
6/25/2010	12:20:21 AM	Main Vac valve opened
6/25/2010	12:20:21 AM	Bypass valve opened
6/25/2010	12:20:21 AM	Helium MFC set to  0.000000
6/25/2010	12:20:22 AM	H2 MFC set to  0.000000
6/25/2010	12:20:22 AM	BCl3 MFC set to  0.000000
6/25/2010	12:20:22 AM	PHl3 MFC set to  0.000000
6/25/2010	12:20:22 AM	SiCl4 MFC set to  0.000000
6/25/2010	12:20:22 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	12:20:22 AM	Tube furnace set to 0
6/25/2010	12:20:22 AM	Run finished at 12:20 AM
6/25/2010	12:20:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:16:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	10:16:01 AM	Recipe started at 10:16 AM
6/25/2010	10:16:01 AM	H2 valve closed
6/25/2010	10:16:01 AM	BCl3 valve closed
6/25/2010	10:16:01 AM	PH3 valve closed
6/25/2010	10:16:01 AM	SiCl4 pre valve closed
6/25/2010	10:16:01 AM	SiCl4 post valve closed
6/25/2010	10:16:01 AM	Main Vac valve closed
6/25/2010	10:16:01 AM	Bypass valve closed
6/25/2010	10:16:01 AM	Bubbler valve closed
6/25/2010	10:16:01 AM	Helium valve opened
6/25/2010	10:16:01 AM	Helium MFC set to  500.000000
6/25/2010	10:16:01 AM	H2 MFC set to  0.000000
6/25/2010	10:16:01 AM	BCl3 MFC set to  0.000000
6/25/2010	10:16:01 AM	PHl3 MFC set to  0.000000
6/25/2010	10:16:01 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:16:01 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:16:02 AM	Tube furnace set to 0
6/25/2010	10:17:22 AM	Helium valve closed
6/25/2010	10:17:22 AM	H2 valve closed
6/25/2010	10:17:22 AM	BCl3 valve closed
6/25/2010	10:17:22 AM	PH3 valve closed
6/25/2010	10:17:22 AM	SiCl4 pre valve closed
6/25/2010	10:17:22 AM	SiCl4 post valve closed
6/25/2010	10:17:22 AM	Main Vac valve closed
6/25/2010	10:17:22 AM	Bypass valve closed
6/25/2010	10:17:22 AM	Bubbler valve closed
6/25/2010	10:17:22 AM	Helium MFC set to  0.000000
6/25/2010	10:17:22 AM	H2 MFC set to  0.000000
6/25/2010	10:17:22 AM	BCl3 MFC set to  0.000000
6/25/2010	10:17:22 AM	PHl3 MFC set to  0.000000
6/25/2010	10:17:22 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:17:22 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:17:22 AM	Tube furnace set to 0
6/25/2010	10:17:22 AM	Run finished at 10:17 AM
6/25/2010	10:17:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	10:24:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:24:27 AM	Recipe started at 10:24 AM
6/25/2010	10:24:27 AM	Helium valve closed
6/25/2010	10:24:27 AM	H2 valve closed
6/25/2010	10:24:27 AM	BCl3 valve closed
6/25/2010	10:24:27 AM	PH3 valve closed
6/25/2010	10:24:27 AM	SiCl4 pre valve closed
6/25/2010	10:24:27 AM	SiCl4 post valve closed
6/25/2010	10:24:27 AM	Main Vac valve closed
6/25/2010	10:24:27 AM	Bubbler valve closed
6/25/2010	10:24:27 AM	Bypass valve opened
6/25/2010	10:24:27 AM	Helium MFC set to  0.000000
6/25/2010	10:24:27 AM	H2 MFC set to  0.000000
6/25/2010	10:24:27 AM	BCl3 MFC set to  0.000000
6/25/2010	10:24:27 AM	PHl3 MFC set to  0.000000
6/25/2010	10:24:27 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:24:27 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:24:27 AM	Tube furnace set to 0
6/25/2010	10:25:15 AM	Helium valve closed
6/25/2010	10:25:15 AM	H2 valve closed
6/25/2010	10:25:15 AM	BCl3 valve closed
6/25/2010	10:25:15 AM	PH3 valve closed
6/25/2010	10:25:15 AM	SiCl4 pre valve closed
6/25/2010	10:25:15 AM	SiCl4 post valve closed
6/25/2010	10:25:15 AM	Bubbler valve closed
6/25/2010	10:25:15 AM	Main Vac valve opened
6/25/2010	10:25:15 AM	Bypass valve opened
6/25/2010	10:25:15 AM	Helium MFC set to  0.000000
6/25/2010	10:25:15 AM	H2 MFC set to  0.000000
6/25/2010	10:25:15 AM	BCl3 MFC set to  0.000000
6/25/2010	10:25:15 AM	PHl3 MFC set to  0.000000
6/25/2010	10:25:15 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:25:15 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:25:15 AM	Tube furnace set to 0
6/25/2010	10:25:16 AM	Run finished at 10:25 AM
6/25/2010	10:25:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:26:53 AM	Helium MFC set to  50.000000
6/25/2010	10:26:54 AM	Helium valve opened
6/25/2010	10:27:04 AM	Helium MFC set to  0.000000
6/25/2010	10:27:04 AM	Helium valve closed
6/25/2010	10:27:49 AM	Recipe started at 10:27 AM
6/25/2010	10:27:49 AM	BCl3 valve closed
6/25/2010	10:27:49 AM	PH3 valve closed
6/25/2010	10:27:49 AM	SiCl4 pre valve closed
6/25/2010	10:27:49 AM	SiCl4 post valve closed
6/25/2010	10:27:49 AM	Main Vac valve closed
6/25/2010	10:27:49 AM	Bypass valve closed
6/25/2010	10:27:49 AM	Bubbler valve closed
6/25/2010	10:27:49 AM	Helium valve opened
6/25/2010	10:27:49 AM	H2 valve opened
6/25/2010	10:27:49 AM	Helium MFC set to  475.000000
6/25/2010	10:27:49 AM	H2 MFC set to  25.000000
6/25/2010	10:27:49 AM	BCl3 MFC set to  0.000000
6/25/2010	10:27:49 AM	PHl3 MFC set to  0.000000
6/25/2010	10:27:49 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:27:49 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:27:50 AM	Tube furnace set to 200
6/25/2010	10:29:11 AM	BCl3 valve closed
6/25/2010	10:29:11 AM	PH3 valve closed
6/25/2010	10:29:11 AM	SiCl4 pre valve closed
6/25/2010	10:29:11 AM	SiCl4 post valve closed
6/25/2010	10:29:11 AM	Main Vac valve closed
6/25/2010	10:29:11 AM	Bypass valve closed
6/25/2010	10:29:11 AM	Helium valve opened
6/25/2010	10:29:11 AM	H2 valve opened
6/25/2010	10:29:11 AM	Bubbler valve opened
6/25/2010	10:29:11 AM	Helium MFC set to  475.000000
6/25/2010	10:29:11 AM	H2 MFC set to  25.000000
6/25/2010	10:29:11 AM	BCl3 MFC set to  0.000000
6/25/2010	10:29:11 AM	PHl3 MFC set to  0.000000
6/25/2010	10:29:11 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:29:11 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:29:11 AM	Tube furnace set to 200
6/25/2010	10:29:26 AM	Run aborted at 10:29 AM
6/25/2010	10:29:26 AM	Helium valve closed
6/25/2010	10:29:26 AM	H2 valve closed
6/25/2010	10:29:26 AM	BCl3 valve closed
6/25/2010	10:29:26 AM	PH3 valve closed
6/25/2010	10:29:26 AM	SiCl4 pre valve closed
6/25/2010	10:29:26 AM	SiCl4 post valve closed
6/25/2010	10:29:26 AM	Bypass valve closed
6/25/2010	10:29:26 AM	Main Vac valve closed
6/25/2010	10:29:26 AM	Bubbler valve closed
6/25/2010	10:29:26 AM	Helium MFC set to  0.000000
6/25/2010	10:29:26 AM	H2 MFC set to  0.000000
6/25/2010	10:29:27 AM	BCl3 MFC set to  0.000000
6/25/2010	10:29:27 AM	PHl3 MFC set to  0.000000
6/25/2010	10:29:27 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:29:27 AM	Tube furnace set to 0
6/25/2010	10:29:51 AM	Recipe started at 10:29 AM
6/25/2010	10:29:51 AM	BCl3 valve closed
6/25/2010	10:29:51 AM	PH3 valve closed
6/25/2010	10:29:52 AM	SiCl4 pre valve closed
6/25/2010	10:29:52 AM	SiCl4 post valve closed
6/25/2010	10:29:52 AM	Main Vac valve closed
6/25/2010	10:29:52 AM	Bypass valve closed
6/25/2010	10:29:52 AM	Bubbler valve closed
6/25/2010	10:29:52 AM	Helium valve opened
6/25/2010	10:29:52 AM	H2 valve opened
6/25/2010	10:29:52 AM	Helium MFC set to  475.000000
6/25/2010	10:29:52 AM	H2 MFC set to  25.000000
6/25/2010	10:29:52 AM	BCl3 MFC set to  0.000000
6/25/2010	10:29:52 AM	PHl3 MFC set to  0.000000
6/25/2010	10:29:52 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:29:52 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:29:52 AM	Tube furnace set to 350
6/25/2010	10:29:52 AM	BCl3 valve closed
6/25/2010	10:29:52 AM	PH3 valve closed
6/25/2010	10:29:52 AM	SiCl4 pre valve closed
6/25/2010	10:29:52 AM	SiCl4 post valve closed
6/25/2010	10:29:52 AM	Main Vac valve closed
6/25/2010	10:29:52 AM	Bypass valve closed
6/25/2010	10:29:52 AM	Helium valve opened
6/25/2010	10:29:52 AM	H2 valve opened
6/25/2010	10:29:52 AM	Bubbler valve opened
6/25/2010	10:29:52 AM	Helium MFC set to  475.000000
6/25/2010	10:29:52 AM	H2 MFC set to  25.000000
6/25/2010	10:29:52 AM	BCl3 MFC set to  0.000000
6/25/2010	10:29:52 AM	PHl3 MFC set to  0.000000
6/25/2010	10:29:52 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:29:52 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:29:52 AM	Tube furnace set to 350
6/25/2010	10:59:52 AM	H2 valve closed
6/25/2010	10:59:52 AM	BCl3 valve closed
6/25/2010	10:59:52 AM	PH3 valve closed
6/25/2010	10:59:52 AM	SiCl4 pre valve closed
6/25/2010	10:59:52 AM	SiCl4 post valve closed
6/25/2010	10:59:52 AM	Main Vac valve closed
6/25/2010	10:59:52 AM	Bypass valve closed
6/25/2010	10:59:52 AM	Helium valve opened
6/25/2010	10:59:52 AM	Bubbler valve opened
6/25/2010	10:59:52 AM	Helium MFC set to  500.000000
6/25/2010	10:59:52 AM	H2 MFC set to  0.000000
6/25/2010	10:59:52 AM	BCl3 MFC set to  0.000000
6/25/2010	10:59:52 AM	PHl3 MFC set to  0.000000
6/25/2010	10:59:52 AM	SiCl4 MFC set to  0.000000
6/25/2010	10:59:52 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:59:53 AM	Tube furnace set to 0
6/25/2010	11:09:53 AM	Helium valve closed
6/25/2010	11:09:53 AM	H2 valve closed
6/25/2010	11:09:53 AM	BCl3 valve closed
6/25/2010	11:09:53 AM	PH3 valve closed
6/25/2010	11:09:53 AM	SiCl4 pre valve closed
6/25/2010	11:09:53 AM	SiCl4 post valve closed
6/25/2010	11:09:53 AM	Main Vac valve closed
6/25/2010	11:09:53 AM	Bypass valve closed
6/25/2010	11:09:53 AM	Bubbler valve closed
6/25/2010	11:09:53 AM	Helium MFC set to  0.000000
6/25/2010	11:09:53 AM	H2 MFC set to  0.000000
6/25/2010	11:09:53 AM	BCl3 MFC set to  0.000000
6/25/2010	11:09:53 AM	PHl3 MFC set to  0.000000
6/25/2010	11:09:53 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:09:53 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:09:53 AM	Tube furnace set to 0
6/25/2010	11:09:53 AM	Run finished at 11:09 AM
6/25/2010	11:24:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:24:52 AM	Recipe started at 11:24 AM
6/25/2010	11:24:52 AM	Helium valve closed
6/25/2010	11:24:52 AM	H2 valve closed
6/25/2010	11:24:52 AM	BCl3 valve closed
6/25/2010	11:24:52 AM	PH3 valve closed
6/25/2010	11:24:52 AM	SiCl4 pre valve closed
6/25/2010	11:24:52 AM	SiCl4 post valve closed
6/25/2010	11:24:52 AM	Main Vac valve closed
6/25/2010	11:24:52 AM	Bubbler valve closed
6/25/2010	11:24:52 AM	Bypass valve opened
6/25/2010	11:24:52 AM	Helium MFC set to  0.000000
6/25/2010	11:24:52 AM	H2 MFC set to  0.000000
6/25/2010	11:24:52 AM	BCl3 MFC set to  0.000000
6/25/2010	11:24:52 AM	PHl3 MFC set to  0.000000
6/25/2010	11:24:52 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:24:52 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:24:52 AM	Tube furnace set to 0
6/25/2010	11:25:40 AM	Helium valve closed
6/25/2010	11:25:40 AM	H2 valve closed
6/25/2010	11:25:40 AM	BCl3 valve closed
6/25/2010	11:25:40 AM	PH3 valve closed
6/25/2010	11:25:40 AM	SiCl4 pre valve closed
6/25/2010	11:25:40 AM	SiCl4 post valve closed
6/25/2010	11:25:40 AM	Bubbler valve closed
6/25/2010	11:25:40 AM	Main Vac valve opened
6/25/2010	11:25:40 AM	Bypass valve opened
6/25/2010	11:25:40 AM	Helium MFC set to  0.000000
6/25/2010	11:25:40 AM	H2 MFC set to  0.000000
6/25/2010	11:25:40 AM	BCl3 MFC set to  0.000000
6/25/2010	11:25:40 AM	PHl3 MFC set to  0.000000
6/25/2010	11:25:40 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:25:40 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:25:40 AM	Tube furnace set to 0
6/25/2010	11:25:41 AM	Run finished at 11:25 AM
6/25/2010	11:25:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:38:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	11:38:37 AM	Recipe started at 11:38 AM
6/25/2010	11:38:37 AM	H2 valve closed
6/25/2010	11:38:37 AM	BCl3 valve closed
6/25/2010	11:38:37 AM	PH3 valve closed
6/25/2010	11:38:37 AM	SiCl4 pre valve closed
6/25/2010	11:38:37 AM	SiCl4 post valve closed
6/25/2010	11:38:37 AM	Main Vac valve closed
6/25/2010	11:38:37 AM	Bypass valve closed
6/25/2010	11:38:37 AM	Bubbler valve closed
6/25/2010	11:38:37 AM	Helium valve opened
6/25/2010	11:38:37 AM	Helium MFC set to  500.000000
6/25/2010	11:38:37 AM	H2 MFC set to  0.000000
6/25/2010	11:38:37 AM	BCl3 MFC set to  0.000000
6/25/2010	11:38:37 AM	PHl3 MFC set to  0.000000
6/25/2010	11:38:37 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:38:37 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:38:37 AM	Tube furnace set to 0
6/25/2010	11:39:56 AM	Helium valve closed
6/25/2010	11:39:56 AM	H2 valve closed
6/25/2010	11:39:56 AM	BCl3 valve closed
6/25/2010	11:39:56 AM	PH3 valve closed
6/25/2010	11:39:56 AM	SiCl4 pre valve closed
6/25/2010	11:39:56 AM	SiCl4 post valve closed
6/25/2010	11:39:56 AM	Main Vac valve closed
6/25/2010	11:39:56 AM	Bypass valve closed
6/25/2010	11:39:56 AM	Bubbler valve closed
6/25/2010	11:39:56 AM	Helium MFC set to  0.000000
6/25/2010	11:39:56 AM	H2 MFC set to  0.000000
6/25/2010	11:39:56 AM	BCl3 MFC set to  0.000000
6/25/2010	11:39:56 AM	PHl3 MFC set to  0.000000
6/25/2010	11:39:56 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:39:56 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:39:56 AM	Tube furnace set to 0
6/25/2010	11:39:57 AM	Run finished at 11:39 AM
6/25/2010	11:39:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	11:45:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:45:05 AM	Recipe started at 11:45 AM
6/25/2010	11:45:05 AM	Helium valve closed
6/25/2010	11:45:05 AM	H2 valve closed
6/25/2010	11:45:05 AM	BCl3 valve closed
6/25/2010	11:45:05 AM	PH3 valve closed
6/25/2010	11:45:05 AM	SiCl4 pre valve closed
6/25/2010	11:45:05 AM	SiCl4 post valve closed
6/25/2010	11:45:05 AM	Main Vac valve closed
6/25/2010	11:45:05 AM	Bubbler valve closed
6/25/2010	11:45:05 AM	Bypass valve opened
6/25/2010	11:45:05 AM	Helium MFC set to  0.000000
6/25/2010	11:45:05 AM	H2 MFC set to  0.000000
6/25/2010	11:45:05 AM	BCl3 MFC set to  0.000000
6/25/2010	11:45:05 AM	PHl3 MFC set to  0.000000
6/25/2010	11:45:05 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:45:05 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:45:05 AM	Tube furnace set to 0
6/25/2010	11:45:52 AM	Helium valve closed
6/25/2010	11:45:52 AM	H2 valve closed
6/25/2010	11:45:52 AM	BCl3 valve closed
6/25/2010	11:45:52 AM	PH3 valve closed
6/25/2010	11:45:52 AM	SiCl4 pre valve closed
6/25/2010	11:45:52 AM	SiCl4 post valve closed
6/25/2010	11:45:52 AM	Bubbler valve closed
6/25/2010	11:45:52 AM	Main Vac valve opened
6/25/2010	11:45:52 AM	Bypass valve opened
6/25/2010	11:45:52 AM	Helium MFC set to  0.000000
6/25/2010	11:45:52 AM	H2 MFC set to  0.000000
6/25/2010	11:45:52 AM	BCl3 MFC set to  0.000000
6/25/2010	11:45:52 AM	PHl3 MFC set to  0.000000
6/25/2010	11:45:52 AM	SiCl4 MFC set to  0.000000
6/25/2010	11:45:52 AM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:45:52 AM	Tube furnace set to 0
6/25/2010	11:45:53 AM	Run finished at 11:45 AM
6/25/2010	11:45:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	1:20:05 PM	Helium valve opened
6/25/2010	1:20:09 PM	Helium MFC set to  100.000000
6/25/2010	1:21:56 PM	Helium valve closed
6/25/2010	1:23:14 PM	Bypass valve closed
6/25/2010	1:23:14 PM	Main Vac valve closed
6/25/2010	1:23:25 PM	Main Vac valve opened
6/25/2010	1:23:25 PM	Bypass valve opened
6/25/2010	1:28:55 PM	Recipe started at 1:28 PM
6/25/2010	1:28:55 PM	Helium valve closed
6/25/2010	1:28:55 PM	BCl3 valve closed
6/25/2010	1:28:55 PM	PH3 valve closed
6/25/2010	1:28:55 PM	SiCl4 pre valve closed
6/25/2010	1:28:55 PM	SiCl4 post valve closed
6/25/2010	1:28:55 PM	Main Vac valve closed
6/25/2010	1:28:55 PM	Bypass valve closed
6/25/2010	1:28:55 PM	Bubbler valve closed
6/25/2010	1:28:55 PM	H2 valve opened
6/25/2010	1:28:55 PM	Helium MFC set to  0.000000
6/25/2010	1:28:55 PM	H2 MFC set to  500.000000
6/25/2010	1:28:55 PM	BCl3 MFC set to  0.000000
6/25/2010	1:28:55 PM	PHl3 MFC set to  0.000000
6/25/2010	1:28:55 PM	SiCl4 MFC set to  0.000000
6/25/2010	1:28:55 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	1:28:56 PM	Tube furnace set to 0
6/25/2010	1:30:17 PM	Helium valve closed
6/25/2010	1:30:17 PM	BCl3 valve closed
6/25/2010	1:30:17 PM	PH3 valve closed
6/25/2010	1:30:17 PM	SiCl4 pre valve closed
6/25/2010	1:30:17 PM	SiCl4 post valve closed
6/25/2010	1:30:17 PM	Main Vac valve closed
6/25/2010	1:30:17 PM	Bypass valve closed
6/25/2010	1:30:17 PM	H2 valve opened
6/25/2010	1:30:17 PM	Bubbler valve opened
6/25/2010	1:30:17 PM	Helium MFC set to  0.000000
6/25/2010	1:30:17 PM	H2 MFC set to  500.000000
6/25/2010	1:30:17 PM	BCl3 MFC set to  0.000000
6/25/2010	1:30:17 PM	PHl3 MFC set to  0.000000
6/25/2010	1:30:17 PM	SiCl4 MFC set to  0.000000
6/25/2010	1:30:17 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	1:30:17 PM	Tube furnace set to 1000
6/25/2010	1:50:17 PM	Helium valve closed
6/25/2010	1:50:17 PM	PH3 valve closed
6/25/2010	1:50:17 PM	Main Vac valve closed
6/25/2010	1:50:17 PM	Bypass valve closed
6/25/2010	1:50:17 PM	H2 valve opened
6/25/2010	1:50:17 PM	BCl3 valve opened
6/25/2010	1:50:17 PM	SiCl4 pre valve opened
6/25/2010	1:50:17 PM	SiCl4 post valve opened
6/25/2010	1:50:17 PM	Bubbler valve opened
6/25/2010	1:50:17 PM	Helium MFC set to  0.000000
6/25/2010	1:50:17 PM	H2 MFC set to  500.000000
6/25/2010	1:50:17 PM	BCl3 MFC set to  10.000000
6/25/2010	1:50:17 PM	PHl3 MFC set to  0.000000
6/25/2010	1:50:17 PM	SiCl4 MFC set to  50.000000
6/25/2010	1:50:17 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	1:50:18 PM	Tube furnace set to 1000
6/25/2010	2:10:18 PM	H2 valve closed
6/25/2010	2:10:18 PM	BCl3 valve closed
6/25/2010	2:10:18 PM	PH3 valve closed
6/25/2010	2:10:18 PM	SiCl4 pre valve closed
6/25/2010	2:10:18 PM	SiCl4 post valve closed
6/25/2010	2:10:18 PM	Main Vac valve closed
6/25/2010	2:10:18 PM	Bypass valve closed
6/25/2010	2:10:18 PM	Helium valve opened
6/25/2010	2:10:18 PM	Bubbler valve opened
6/25/2010	2:10:18 PM	Helium MFC set to  500.000000
6/25/2010	2:10:18 PM	H2 MFC set to  0.000000
6/25/2010	2:10:18 PM	BCl3 MFC set to  0.000000
6/25/2010	2:10:18 PM	PHl3 MFC set to  0.000000
6/25/2010	2:10:18 PM	SiCl4 MFC set to  0.000000
6/25/2010	2:10:18 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	2:10:18 PM	Tube furnace set to 0
6/25/2010	2:30:18 PM	Helium valve closed
6/25/2010	2:30:18 PM	H2 valve closed
6/25/2010	2:30:18 PM	BCl3 valve closed
6/25/2010	2:30:18 PM	PH3 valve closed
6/25/2010	2:30:18 PM	SiCl4 pre valve closed
6/25/2010	2:30:18 PM	SiCl4 post valve closed
6/25/2010	2:30:18 PM	Main Vac valve closed
6/25/2010	2:30:18 PM	Bypass valve closed
6/25/2010	2:30:18 PM	Bubbler valve closed
6/25/2010	2:30:18 PM	Helium MFC set to  0.000000
6/25/2010	2:30:18 PM	H2 MFC set to  0.000000
6/25/2010	2:30:18 PM	BCl3 MFC set to  0.000000
6/25/2010	2:30:18 PM	PHl3 MFC set to  0.000000
6/25/2010	2:30:18 PM	SiCl4 MFC set to  0.000000
6/25/2010	2:30:18 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	2:30:18 PM	Tube furnace set to 0
6/25/2010	2:30:18 PM	Run finished at 2:30 PM
6/25/2010	3:00:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	3:00:26 PM	Recipe started at 3:00 PM
6/25/2010	3:00:26 PM	Helium valve closed
6/25/2010	3:00:26 PM	H2 valve closed
6/25/2010	3:00:26 PM	BCl3 valve closed
6/25/2010	3:00:26 PM	PH3 valve closed
6/25/2010	3:00:26 PM	SiCl4 pre valve closed
6/25/2010	3:00:26 PM	SiCl4 post valve closed
6/25/2010	3:00:26 PM	Main Vac valve closed
6/25/2010	3:00:26 PM	Bubbler valve closed
6/25/2010	3:00:26 PM	Bypass valve opened
6/25/2010	3:00:26 PM	Helium MFC set to  0.000000
6/25/2010	3:00:26 PM	H2 MFC set to  0.000000
6/25/2010	3:00:26 PM	BCl3 MFC set to  0.000000
6/25/2010	3:00:26 PM	PHl3 MFC set to  0.000000
6/25/2010	3:00:26 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:00:26 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:00:26 PM	Tube furnace set to 0
6/25/2010	3:01:14 PM	Helium valve closed
6/25/2010	3:01:14 PM	H2 valve closed
6/25/2010	3:01:14 PM	BCl3 valve closed
6/25/2010	3:01:14 PM	PH3 valve closed
6/25/2010	3:01:14 PM	SiCl4 pre valve closed
6/25/2010	3:01:14 PM	SiCl4 post valve closed
6/25/2010	3:01:14 PM	Bubbler valve closed
6/25/2010	3:01:14 PM	Main Vac valve opened
6/25/2010	3:01:14 PM	Bypass valve opened
6/25/2010	3:01:14 PM	Helium MFC set to  0.000000
6/25/2010	3:01:14 PM	H2 MFC set to  0.000000
6/25/2010	3:01:15 PM	BCl3 MFC set to  0.000000
6/25/2010	3:01:15 PM	PHl3 MFC set to  0.000000
6/25/2010	3:01:15 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:01:15 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:01:15 PM	Tube furnace set to 0
6/25/2010	3:01:15 PM	Run finished at 3:01 PM
6/25/2010	3:01:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	3:03:53 PM	Helium MFC set to  100.000000
6/25/2010	3:03:54 PM	Helium valve opened
6/25/2010	3:09:25 PM	Helium MFC set to  0.000000
6/25/2010	3:09:27 PM	Helium valve closed
6/25/2010	3:12:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/25/2010	3:12:53 PM	Recipe started at 3:12 PM
6/25/2010	3:12:53 PM	H2 valve closed
6/25/2010	3:12:53 PM	BCl3 valve closed
6/25/2010	3:12:53 PM	PH3 valve closed
6/25/2010	3:12:53 PM	SiCl4 pre valve closed
6/25/2010	3:12:53 PM	SiCl4 post valve closed
6/25/2010	3:12:53 PM	Main Vac valve closed
6/25/2010	3:12:53 PM	Bypass valve closed
6/25/2010	3:12:53 PM	Bubbler valve closed
6/25/2010	3:12:53 PM	Helium valve opened
6/25/2010	3:12:53 PM	Helium MFC set to  500.000000
6/25/2010	3:12:53 PM	H2 MFC set to  0.000000
6/25/2010	3:12:53 PM	BCl3 MFC set to  0.000000
6/25/2010	3:12:53 PM	PHl3 MFC set to  0.000000
6/25/2010	3:12:53 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:12:53 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:12:54 PM	Tube furnace set to 0
6/25/2010	3:14:13 PM	Helium valve closed
6/25/2010	3:14:13 PM	H2 valve closed
6/25/2010	3:14:13 PM	BCl3 valve closed
6/25/2010	3:14:13 PM	PH3 valve closed
6/25/2010	3:14:13 PM	SiCl4 pre valve closed
6/25/2010	3:14:13 PM	SiCl4 post valve closed
6/25/2010	3:14:13 PM	Main Vac valve closed
6/25/2010	3:14:13 PM	Bypass valve closed
6/25/2010	3:14:13 PM	Bubbler valve closed
6/25/2010	3:14:13 PM	Helium MFC set to  0.000000
6/25/2010	3:14:13 PM	H2 MFC set to  0.000000
6/25/2010	3:14:13 PM	BCl3 MFC set to  0.000000
6/25/2010	3:14:13 PM	PHl3 MFC set to  0.000000
6/25/2010	3:14:13 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:14:13 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:14:13 PM	Tube furnace set to 0
6/25/2010	3:14:29 PM	Helium valve closed
6/25/2010	3:14:29 PM	H2 valve closed
6/25/2010	3:14:29 PM	BCl3 valve closed
6/25/2010	3:14:29 PM	PH3 valve closed
6/25/2010	3:14:29 PM	SiCl4 pre valve closed
6/25/2010	3:14:29 PM	SiCl4 post valve closed
6/25/2010	3:14:29 PM	Main Vac valve closed
6/25/2010	3:14:29 PM	Bubbler valve closed
6/25/2010	3:14:29 PM	Bypass valve opened
6/25/2010	3:14:29 PM	Helium MFC set to  0.000000
6/25/2010	3:14:29 PM	H2 MFC set to  0.000000
6/25/2010	3:14:29 PM	BCl3 MFC set to  0.000000
6/25/2010	3:14:29 PM	PHl3 MFC set to  0.000000
6/25/2010	3:14:29 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:14:29 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:14:29 PM	Tube furnace set to 0
6/25/2010	3:15:02 PM	Helium valve closed
6/25/2010	3:15:02 PM	H2 valve closed
6/25/2010	3:15:02 PM	BCl3 valve closed
6/25/2010	3:15:02 PM	PH3 valve closed
6/25/2010	3:15:02 PM	SiCl4 pre valve closed
6/25/2010	3:15:02 PM	SiCl4 post valve closed
6/25/2010	3:15:02 PM	Bubbler valve closed
6/25/2010	3:15:02 PM	Main Vac valve opened
6/25/2010	3:15:02 PM	Bypass valve opened
6/25/2010	3:15:02 PM	Helium MFC set to  0.000000
6/25/2010	3:15:02 PM	H2 MFC set to  0.000000
6/25/2010	3:15:02 PM	BCl3 MFC set to  0.000000
6/25/2010	3:15:02 PM	PHl3 MFC set to  0.000000
6/25/2010	3:15:02 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:15:02 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:15:02 PM	Tube furnace set to 0
6/25/2010	3:20:02 PM	H2 valve closed
6/25/2010	3:20:02 PM	BCl3 valve closed
6/25/2010	3:20:02 PM	PH3 valve closed
6/25/2010	3:20:02 PM	SiCl4 pre valve closed
6/25/2010	3:20:02 PM	SiCl4 post valve closed
6/25/2010	3:20:02 PM	Main Vac valve closed
6/25/2010	3:20:02 PM	Bypass valve closed
6/25/2010	3:20:02 PM	Bubbler valve closed
6/25/2010	3:20:02 PM	Helium valve opened
6/25/2010	3:20:02 PM	Helium MFC set to  500.000000
6/25/2010	3:20:02 PM	H2 MFC set to  0.000000
6/25/2010	3:20:02 PM	BCl3 MFC set to  0.000000
6/25/2010	3:20:02 PM	PHl3 MFC set to  0.000000
6/25/2010	3:20:02 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:20:02 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:20:02 PM	Tube furnace set to 0
6/25/2010	3:21:22 PM	Helium valve closed
6/25/2010	3:21:22 PM	H2 valve closed
6/25/2010	3:21:22 PM	BCl3 valve closed
6/25/2010	3:21:22 PM	PH3 valve closed
6/25/2010	3:21:22 PM	SiCl4 pre valve closed
6/25/2010	3:21:22 PM	SiCl4 post valve closed
6/25/2010	3:21:22 PM	Main Vac valve closed
6/25/2010	3:21:22 PM	Bypass valve closed
6/25/2010	3:21:22 PM	Bubbler valve closed
6/25/2010	3:21:22 PM	Helium MFC set to  0.000000
6/25/2010	3:21:22 PM	H2 MFC set to  0.000000
6/25/2010	3:21:22 PM	BCl3 MFC set to  0.000000
6/25/2010	3:21:22 PM	PHl3 MFC set to  0.000000
6/25/2010	3:21:22 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:21:22 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:21:22 PM	Tube furnace set to 0
6/25/2010	3:21:37 PM	Helium valve closed
6/25/2010	3:21:37 PM	H2 valve closed
6/25/2010	3:21:37 PM	BCl3 valve closed
6/25/2010	3:21:37 PM	PH3 valve closed
6/25/2010	3:21:37 PM	SiCl4 pre valve closed
6/25/2010	3:21:37 PM	SiCl4 post valve closed
6/25/2010	3:21:37 PM	Main Vac valve closed
6/25/2010	3:21:37 PM	Bubbler valve closed
6/25/2010	3:21:37 PM	Bypass valve opened
6/25/2010	3:21:37 PM	Helium MFC set to  0.000000
6/25/2010	3:21:37 PM	H2 MFC set to  0.000000
6/25/2010	3:21:37 PM	BCl3 MFC set to  0.000000
6/25/2010	3:21:37 PM	PHl3 MFC set to  0.000000
6/25/2010	3:21:37 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:21:37 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:21:37 PM	Tube furnace set to 0
6/25/2010	3:22:10 PM	Helium valve closed
6/25/2010	3:22:10 PM	H2 valve closed
6/25/2010	3:22:10 PM	BCl3 valve closed
6/25/2010	3:22:10 PM	PH3 valve closed
6/25/2010	3:22:10 PM	SiCl4 pre valve closed
6/25/2010	3:22:10 PM	SiCl4 post valve closed
6/25/2010	3:22:10 PM	Bubbler valve closed
6/25/2010	3:22:10 PM	Main Vac valve opened
6/25/2010	3:22:10 PM	Bypass valve opened
6/25/2010	3:22:10 PM	Helium MFC set to  0.000000
6/25/2010	3:22:10 PM	H2 MFC set to  0.000000
6/25/2010	3:22:10 PM	BCl3 MFC set to  0.000000
6/25/2010	3:22:10 PM	PHl3 MFC set to  0.000000
6/25/2010	3:22:10 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:22:10 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:22:10 PM	Tube furnace set to 0
6/25/2010	3:27:10 PM	H2 valve closed
6/25/2010	3:27:10 PM	BCl3 valve closed
6/25/2010	3:27:10 PM	PH3 valve closed
6/25/2010	3:27:10 PM	SiCl4 pre valve closed
6/25/2010	3:27:10 PM	SiCl4 post valve closed
6/25/2010	3:27:10 PM	Main Vac valve closed
6/25/2010	3:27:10 PM	Bypass valve closed
6/25/2010	3:27:10 PM	Bubbler valve closed
6/25/2010	3:27:10 PM	Helium valve opened
6/25/2010	3:27:10 PM	Helium MFC set to  500.000000
6/25/2010	3:27:10 PM	H2 MFC set to  0.000000
6/25/2010	3:27:10 PM	BCl3 MFC set to  0.000000
6/25/2010	3:27:10 PM	PHl3 MFC set to  0.000000
6/25/2010	3:27:10 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:27:10 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:27:10 PM	Tube furnace set to 0
6/25/2010	3:28:30 PM	Helium valve closed
6/25/2010	3:28:30 PM	H2 valve closed
6/25/2010	3:28:30 PM	BCl3 valve closed
6/25/2010	3:28:30 PM	PH3 valve closed
6/25/2010	3:28:30 PM	SiCl4 pre valve closed
6/25/2010	3:28:30 PM	SiCl4 post valve closed
6/25/2010	3:28:30 PM	Main Vac valve closed
6/25/2010	3:28:30 PM	Bypass valve closed
6/25/2010	3:28:30 PM	Bubbler valve closed
6/25/2010	3:28:30 PM	Helium MFC set to  0.000000
6/25/2010	3:28:30 PM	H2 MFC set to  0.000000
6/25/2010	3:28:30 PM	BCl3 MFC set to  0.000000
6/25/2010	3:28:30 PM	PHl3 MFC set to  0.000000
6/25/2010	3:28:30 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:28:30 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:28:30 PM	Tube furnace set to 0
6/25/2010	3:28:45 PM	Helium valve closed
6/25/2010	3:28:45 PM	H2 valve closed
6/25/2010	3:28:45 PM	BCl3 valve closed
6/25/2010	3:28:45 PM	PH3 valve closed
6/25/2010	3:28:45 PM	SiCl4 pre valve closed
6/25/2010	3:28:45 PM	SiCl4 post valve closed
6/25/2010	3:28:45 PM	Main Vac valve closed
6/25/2010	3:28:45 PM	Bubbler valve closed
6/25/2010	3:28:45 PM	Bypass valve opened
6/25/2010	3:28:45 PM	Helium MFC set to  0.000000
6/25/2010	3:28:45 PM	H2 MFC set to  0.000000
6/25/2010	3:28:45 PM	BCl3 MFC set to  0.000000
6/25/2010	3:28:45 PM	PHl3 MFC set to  0.000000
6/25/2010	3:28:45 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:28:45 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:28:45 PM	Tube furnace set to 0
6/25/2010	3:29:18 PM	Helium valve closed
6/25/2010	3:29:18 PM	H2 valve closed
6/25/2010	3:29:18 PM	BCl3 valve closed
6/25/2010	3:29:18 PM	PH3 valve closed
6/25/2010	3:29:18 PM	SiCl4 pre valve closed
6/25/2010	3:29:18 PM	SiCl4 post valve closed
6/25/2010	3:29:18 PM	Bubbler valve closed
6/25/2010	3:29:18 PM	Main Vac valve opened
6/25/2010	3:29:18 PM	Bypass valve opened
6/25/2010	3:29:18 PM	Helium MFC set to  0.000000
6/25/2010	3:29:18 PM	H2 MFC set to  0.000000
6/25/2010	3:29:18 PM	BCl3 MFC set to  0.000000
6/25/2010	3:29:18 PM	PHl3 MFC set to  0.000000
6/25/2010	3:29:18 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:29:18 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:29:18 PM	Tube furnace set to 0
6/25/2010	3:34:18 PM	Helium valve closed
6/25/2010	3:34:18 PM	H2 valve closed
6/25/2010	3:34:18 PM	BCl3 valve closed
6/25/2010	3:34:18 PM	PH3 valve closed
6/25/2010	3:34:18 PM	SiCl4 pre valve closed
6/25/2010	3:34:18 PM	SiCl4 post valve closed
6/25/2010	3:34:18 PM	Bubbler valve closed
6/25/2010	3:34:18 PM	Main Vac valve opened
6/25/2010	3:34:18 PM	Bypass valve opened
6/25/2010	3:34:18 PM	Helium MFC set to  0.000000
6/25/2010	3:34:18 PM	H2 MFC set to  0.000000
6/25/2010	3:34:18 PM	BCl3 MFC set to  0.000000
6/25/2010	3:34:18 PM	PHl3 MFC set to  0.000000
6/25/2010	3:34:18 PM	SiCl4 MFC set to  0.000000
6/25/2010	3:34:18 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	3:34:18 PM	Tube furnace set to 0
6/25/2010	3:34:19 PM	Run finished at 3:34 PM
6/25/2010	3:34:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/25/2010	3:44:48 PM	Helium valve opened
6/25/2010	3:44:51 PM	Helium MFC set to  100.000000
6/25/2010	3:49:38 PM	Helium MFC set to  0.000000
6/25/2010	3:49:39 PM	Helium valve closed
6/25/2010	5:01:07 PM	Recipe started at 5:01 PM
6/25/2010	5:01:07 PM	Helium valve closed
6/25/2010	5:01:07 PM	BCl3 valve closed
6/25/2010	5:01:07 PM	PH3 valve closed
6/25/2010	5:01:07 PM	SiCl4 pre valve closed
6/25/2010	5:01:07 PM	SiCl4 post valve closed
6/25/2010	5:01:07 PM	Main Vac valve closed
6/25/2010	5:01:07 PM	Bypass valve closed
6/25/2010	5:01:07 PM	Bubbler valve closed
6/25/2010	5:01:07 PM	H2 valve opened
6/25/2010	5:01:07 PM	Helium MFC set to  0.000000
6/25/2010	5:01:07 PM	H2 MFC set to  500.000000
6/25/2010	5:01:07 PM	BCl3 MFC set to  0.000000
6/25/2010	5:01:07 PM	PHl3 MFC set to  0.000000
6/25/2010	5:01:07 PM	SiCl4 MFC set to  0.000000
6/25/2010	5:01:07 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	5:01:07 PM	Tube furnace set to 0
6/25/2010	5:02:28 PM	Helium valve closed
6/25/2010	5:02:28 PM	BCl3 valve closed
6/25/2010	5:02:28 PM	PH3 valve closed
6/25/2010	5:02:28 PM	SiCl4 pre valve closed
6/25/2010	5:02:28 PM	SiCl4 post valve closed
6/25/2010	5:02:28 PM	Main Vac valve closed
6/25/2010	5:02:28 PM	Bypass valve closed
6/25/2010	5:02:28 PM	H2 valve opened
6/25/2010	5:02:28 PM	Bubbler valve opened
6/25/2010	5:02:28 PM	Helium MFC set to  0.000000
6/25/2010	5:02:28 PM	H2 MFC set to  500.000000
6/25/2010	5:02:28 PM	BCl3 MFC set to  0.000000
6/25/2010	5:02:28 PM	PHl3 MFC set to  0.000000
6/25/2010	5:02:28 PM	SiCl4 MFC set to  0.000000
6/25/2010	5:02:28 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	5:02:28 PM	Tube furnace set to 1000
6/25/2010	5:22:28 PM	Helium valve closed
6/25/2010	5:22:28 PM	PH3 valve closed
6/25/2010	5:22:28 PM	Main Vac valve closed
6/25/2010	5:22:28 PM	Bypass valve closed
6/25/2010	5:22:28 PM	H2 valve opened
6/25/2010	5:22:28 PM	BCl3 valve opened
6/25/2010	5:22:28 PM	SiCl4 pre valve opened
6/25/2010	5:22:28 PM	SiCl4 post valve opened
6/25/2010	5:22:28 PM	Bubbler valve opened
6/25/2010	5:22:28 PM	Helium MFC set to  0.000000
6/25/2010	5:22:28 PM	H2 MFC set to  500.000000
6/25/2010	5:22:28 PM	BCl3 MFC set to  10.000000
6/25/2010	5:22:28 PM	PHl3 MFC set to  0.000000
6/25/2010	5:22:28 PM	SiCl4 MFC set to  50.000000
6/25/2010	5:22:28 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	5:22:29 PM	Tube furnace set to 1000
6/25/2010	5:42:28 PM	H2 valve closed
6/25/2010	5:42:28 PM	BCl3 valve closed
6/25/2010	5:42:28 PM	PH3 valve closed
6/25/2010	5:42:28 PM	SiCl4 pre valve closed
6/25/2010	5:42:28 PM	SiCl4 post valve closed
6/25/2010	5:42:28 PM	Main Vac valve closed
6/25/2010	5:42:28 PM	Bypass valve closed
6/25/2010	5:42:29 PM	Helium valve opened
6/25/2010	5:42:29 PM	Bubbler valve opened
6/25/2010	5:42:29 PM	Helium MFC set to  500.000000
6/25/2010	5:42:29 PM	H2 MFC set to  0.000000
6/25/2010	5:42:29 PM	BCl3 MFC set to  0.000000
6/25/2010	5:42:29 PM	PHl3 MFC set to  0.000000
6/25/2010	5:42:29 PM	SiCl4 MFC set to  0.000000
6/25/2010	5:42:29 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	5:42:29 PM	Tube furnace set to 0
6/25/2010	6:02:29 PM	Helium valve closed
6/25/2010	6:02:29 PM	H2 valve closed
6/25/2010	6:02:29 PM	BCl3 valve closed
6/25/2010	6:02:29 PM	PH3 valve closed
6/25/2010	6:02:29 PM	SiCl4 pre valve closed
6/25/2010	6:02:29 PM	SiCl4 post valve closed
6/25/2010	6:02:29 PM	Main Vac valve closed
6/25/2010	6:02:29 PM	Bypass valve closed
6/25/2010	6:02:29 PM	Bubbler valve closed
6/25/2010	6:02:29 PM	Helium MFC set to  0.000000
6/25/2010	6:02:29 PM	H2 MFC set to  0.000000
6/25/2010	6:02:29 PM	BCl3 MFC set to  0.000000
6/25/2010	6:02:29 PM	PHl3 MFC set to  0.000000
6/25/2010	6:02:29 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:02:29 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:02:29 PM	Tube furnace set to 0
6/25/2010	6:02:29 PM	Run finished at 6:02 PM
6/25/2010	6:43:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	6:43:09 PM	Recipe started at 6:43 PM
6/25/2010	6:43:09 PM	Helium valve closed
6/25/2010	6:43:09 PM	H2 valve closed
6/25/2010	6:43:09 PM	BCl3 valve closed
6/25/2010	6:43:09 PM	PH3 valve closed
6/25/2010	6:43:09 PM	SiCl4 pre valve closed
6/25/2010	6:43:09 PM	SiCl4 post valve closed
6/25/2010	6:43:09 PM	Main Vac valve closed
6/25/2010	6:43:09 PM	Bubbler valve closed
6/25/2010	6:43:09 PM	Bypass valve opened
6/25/2010	6:43:09 PM	Helium MFC set to  0.000000
6/25/2010	6:43:09 PM	H2 MFC set to  0.000000
6/25/2010	6:43:09 PM	BCl3 MFC set to  0.000000
6/25/2010	6:43:09 PM	PHl3 MFC set to  0.000000
6/25/2010	6:43:09 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:43:09 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:43:10 PM	Tube furnace set to 0
6/25/2010	6:43:58 PM	Helium valve closed
6/25/2010	6:43:58 PM	H2 valve closed
6/25/2010	6:43:58 PM	BCl3 valve closed
6/25/2010	6:43:58 PM	PH3 valve closed
6/25/2010	6:43:58 PM	SiCl4 pre valve closed
6/25/2010	6:43:58 PM	SiCl4 post valve closed
6/25/2010	6:43:58 PM	Bubbler valve closed
6/25/2010	6:43:58 PM	Main Vac valve opened
6/25/2010	6:43:58 PM	Bypass valve opened
6/25/2010	6:43:58 PM	Helium MFC set to  0.000000
6/25/2010	6:43:58 PM	H2 MFC set to  0.000000
6/25/2010	6:43:58 PM	BCl3 MFC set to  0.000000
6/25/2010	6:43:58 PM	PHl3 MFC set to  0.000000
6/25/2010	6:43:58 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:43:58 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:43:58 PM	Tube furnace set to 0
6/25/2010	6:43:58 PM	Run finished at 6:43 PM
6/25/2010	6:43:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	6:45:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	6:45:55 PM	Recipe started at 6:45 PM
6/25/2010	6:45:55 PM	H2 valve closed
6/25/2010	6:45:55 PM	BCl3 valve closed
6/25/2010	6:45:55 PM	PH3 valve closed
6/25/2010	6:45:55 PM	SiCl4 pre valve closed
6/25/2010	6:45:55 PM	SiCl4 post valve closed
6/25/2010	6:45:55 PM	Main Vac valve closed
6/25/2010	6:45:55 PM	Bypass valve closed
6/25/2010	6:45:55 PM	Bubbler valve closed
6/25/2010	6:45:55 PM	Helium valve opened
6/25/2010	6:45:55 PM	Helium MFC set to  500.000000
6/25/2010	6:45:55 PM	H2 MFC set to  0.000000
6/25/2010	6:45:55 PM	BCl3 MFC set to  0.000000
6/25/2010	6:45:55 PM	PHl3 MFC set to  0.000000
6/25/2010	6:45:55 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:45:55 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:45:55 PM	Tube furnace set to 0
6/25/2010	6:47:12 PM	Helium valve closed
6/25/2010	6:47:12 PM	H2 valve closed
6/25/2010	6:47:12 PM	BCl3 valve closed
6/25/2010	6:47:12 PM	PH3 valve closed
6/25/2010	6:47:12 PM	SiCl4 pre valve closed
6/25/2010	6:47:12 PM	SiCl4 post valve closed
6/25/2010	6:47:12 PM	Main Vac valve closed
6/25/2010	6:47:12 PM	Bypass valve closed
6/25/2010	6:47:12 PM	Bubbler valve closed
6/25/2010	6:47:12 PM	Helium MFC set to  0.000000
6/25/2010	6:47:12 PM	H2 MFC set to  0.000000
6/25/2010	6:47:12 PM	BCl3 MFC set to  0.000000
6/25/2010	6:47:13 PM	PHl3 MFC set to  0.000000
6/25/2010	6:47:13 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:47:13 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:47:13 PM	Tube furnace set to 0
6/25/2010	6:47:13 PM	Run finished at 6:47 PM
6/25/2010	6:47:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	6:48:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	6:48:32 PM	Recipe started at 6:48 PM
6/25/2010	6:48:32 PM	Helium valve closed
6/25/2010	6:48:32 PM	H2 valve closed
6/25/2010	6:48:32 PM	BCl3 valve closed
6/25/2010	6:48:32 PM	PH3 valve closed
6/25/2010	6:48:32 PM	SiCl4 pre valve closed
6/25/2010	6:48:32 PM	SiCl4 post valve closed
6/25/2010	6:48:32 PM	Main Vac valve closed
6/25/2010	6:48:32 PM	Bubbler valve closed
6/25/2010	6:48:32 PM	Bypass valve opened
6/25/2010	6:48:32 PM	Helium MFC set to  0.000000
6/25/2010	6:48:32 PM	H2 MFC set to  0.000000
6/25/2010	6:48:32 PM	BCl3 MFC set to  0.000000
6/25/2010	6:48:32 PM	PHl3 MFC set to  0.000000
6/25/2010	6:48:32 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:48:32 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:48:32 PM	Tube furnace set to 0
6/25/2010	6:49:17 PM	Helium valve closed
6/25/2010	6:49:17 PM	H2 valve closed
6/25/2010	6:49:17 PM	BCl3 valve closed
6/25/2010	6:49:17 PM	PH3 valve closed
6/25/2010	6:49:17 PM	SiCl4 pre valve closed
6/25/2010	6:49:17 PM	SiCl4 post valve closed
6/25/2010	6:49:17 PM	Bubbler valve closed
6/25/2010	6:49:17 PM	Main Vac valve opened
6/25/2010	6:49:17 PM	Bypass valve opened
6/25/2010	6:49:17 PM	Helium MFC set to  0.000000
6/25/2010	6:49:17 PM	H2 MFC set to  0.000000
6/25/2010	6:49:17 PM	BCl3 MFC set to  0.000000
6/25/2010	6:49:17 PM	PHl3 MFC set to  0.000000
6/25/2010	6:49:17 PM	SiCl4 MFC set to  0.000000
6/25/2010	6:49:17 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	6:49:17 PM	Tube furnace set to 0
6/25/2010	6:49:18 PM	Run finished at 6:49 PM
6/25/2010	6:49:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	7:24:00 PM	Helium valve opened
6/25/2010	7:24:03 PM	Helium MFC set to  100.000000
6/25/2010	7:33:24 PM	Helium MFC set to  0.000000
6/25/2010	7:33:26 PM	Helium valve closed
6/25/2010	7:34:07 PM	Bypass valve closed
6/25/2010	7:34:08 PM	Main Vac valve closed
6/25/2010	7:34:13 PM	Main Vac valve opened
6/25/2010	7:34:13 PM	Bypass valve opened
6/25/2010	7:35:10 PM	Recipe started at 7:35 PM
6/25/2010	7:35:10 PM	Helium valve closed
6/25/2010	7:35:10 PM	BCl3 valve closed
6/25/2010	7:35:10 PM	PH3 valve closed
6/25/2010	7:35:10 PM	SiCl4 pre valve closed
6/25/2010	7:35:10 PM	SiCl4 post valve closed
6/25/2010	7:35:10 PM	Main Vac valve closed
6/25/2010	7:35:10 PM	Bypass valve closed
6/25/2010	7:35:10 PM	Bubbler valve closed
6/25/2010	7:35:10 PM	H2 valve opened
6/25/2010	7:35:10 PM	Helium MFC set to  0.000000
6/25/2010	7:35:10 PM	H2 MFC set to  500.000000
6/25/2010	7:35:10 PM	BCl3 MFC set to  0.000000
6/25/2010	7:35:10 PM	PHl3 MFC set to  0.000000
6/25/2010	7:35:10 PM	SiCl4 MFC set to  0.000000
6/25/2010	7:35:10 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	7:35:11 PM	Tube furnace set to 0
6/25/2010	7:36:31 PM	Helium valve closed
6/25/2010	7:36:31 PM	BCl3 valve closed
6/25/2010	7:36:31 PM	PH3 valve closed
6/25/2010	7:36:31 PM	SiCl4 pre valve closed
6/25/2010	7:36:31 PM	SiCl4 post valve closed
6/25/2010	7:36:31 PM	Main Vac valve closed
6/25/2010	7:36:31 PM	Bypass valve closed
6/25/2010	7:36:31 PM	H2 valve opened
6/25/2010	7:36:31 PM	Bubbler valve opened
6/25/2010	7:36:31 PM	Helium MFC set to  0.000000
6/25/2010	7:36:31 PM	H2 MFC set to  500.000000
6/25/2010	7:36:31 PM	BCl3 MFC set to  0.000000
6/25/2010	7:36:31 PM	PHl3 MFC set to  0.000000
6/25/2010	7:36:31 PM	SiCl4 MFC set to  0.000000
6/25/2010	7:36:31 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	7:36:31 PM	Tube furnace set to 1000
6/25/2010	7:56:31 PM	Helium valve closed
6/25/2010	7:56:31 PM	PH3 valve closed
6/25/2010	7:56:31 PM	Main Vac valve closed
6/25/2010	7:56:31 PM	Bypass valve closed
6/25/2010	7:56:31 PM	H2 valve opened
6/25/2010	7:56:31 PM	BCl3 valve opened
6/25/2010	7:56:31 PM	SiCl4 pre valve opened
6/25/2010	7:56:31 PM	SiCl4 post valve opened
6/25/2010	7:56:31 PM	Bubbler valve opened
6/25/2010	7:56:31 PM	Helium MFC set to  0.000000
6/25/2010	7:56:31 PM	H2 MFC set to  500.000000
6/25/2010	7:56:31 PM	BCl3 MFC set to  10.000000
6/25/2010	7:56:31 PM	PHl3 MFC set to  0.000000
6/25/2010	7:56:31 PM	SiCl4 MFC set to  50.000000
6/25/2010	7:56:31 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	7:56:31 PM	Tube furnace set to 1000
6/25/2010	8:11:31 PM	H2 valve closed
6/25/2010	8:11:31 PM	BCl3 valve closed
6/25/2010	8:11:31 PM	PH3 valve closed
6/25/2010	8:11:31 PM	SiCl4 pre valve closed
6/25/2010	8:11:31 PM	SiCl4 post valve closed
6/25/2010	8:11:31 PM	Main Vac valve closed
6/25/2010	8:11:31 PM	Bypass valve closed
6/25/2010	8:11:31 PM	Helium valve opened
6/25/2010	8:11:31 PM	Bubbler valve opened
6/25/2010	8:11:31 PM	Helium MFC set to  500.000000
6/25/2010	8:11:31 PM	H2 MFC set to  0.000000
6/25/2010	8:11:31 PM	BCl3 MFC set to  0.000000
6/25/2010	8:11:31 PM	PHl3 MFC set to  0.000000
6/25/2010	8:11:31 PM	SiCl4 MFC set to  0.000000
6/25/2010	8:11:31 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	8:11:31 PM	Tube furnace set to 0
6/25/2010	8:31:31 PM	Helium valve closed
6/25/2010	8:31:31 PM	H2 valve closed
6/25/2010	8:31:31 PM	BCl3 valve closed
6/25/2010	8:31:31 PM	PH3 valve closed
6/25/2010	8:31:31 PM	SiCl4 pre valve closed
6/25/2010	8:31:31 PM	SiCl4 post valve closed
6/25/2010	8:31:31 PM	Main Vac valve closed
6/25/2010	8:31:31 PM	Bypass valve closed
6/25/2010	8:31:31 PM	Bubbler valve closed
6/25/2010	8:31:31 PM	Helium MFC set to  0.000000
6/25/2010	8:31:31 PM	H2 MFC set to  0.000000
6/25/2010	8:31:31 PM	BCl3 MFC set to  0.000000
6/25/2010	8:31:31 PM	PHl3 MFC set to  0.000000
6/25/2010	8:31:31 PM	SiCl4 MFC set to  0.000000
6/25/2010	8:31:31 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	8:31:31 PM	Tube furnace set to 0
6/25/2010	8:31:32 PM	Run finished at 8:31 PM
6/25/2010	8:47:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	8:47:27 PM	Recipe started at 8:47 PM
6/25/2010	8:47:27 PM	Helium valve closed
6/25/2010	8:47:27 PM	H2 valve closed
6/25/2010	8:47:27 PM	BCl3 valve closed
6/25/2010	8:47:27 PM	PH3 valve closed
6/25/2010	8:47:27 PM	SiCl4 pre valve closed
6/25/2010	8:47:27 PM	SiCl4 post valve closed
6/25/2010	8:47:27 PM	Main Vac valve closed
6/25/2010	8:47:27 PM	Bubbler valve closed
6/25/2010	8:47:27 PM	Bypass valve opened
6/25/2010	8:47:27 PM	Helium MFC set to  0.000000
6/25/2010	8:47:27 PM	H2 MFC set to  0.000000
6/25/2010	8:47:27 PM	BCl3 MFC set to  0.000000
6/25/2010	8:47:27 PM	PHl3 MFC set to  0.000000
6/25/2010	8:47:27 PM	SiCl4 MFC set to  0.000000
6/25/2010	8:47:27 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	8:47:27 PM	Tube furnace set to 0
6/25/2010	8:48:13 PM	Helium valve closed
6/25/2010	8:48:13 PM	H2 valve closed
6/25/2010	8:48:13 PM	BCl3 valve closed
6/25/2010	8:48:13 PM	PH3 valve closed
6/25/2010	8:48:13 PM	SiCl4 pre valve closed
6/25/2010	8:48:13 PM	SiCl4 post valve closed
6/25/2010	8:48:13 PM	Bubbler valve closed
6/25/2010	8:48:13 PM	Main Vac valve opened
6/25/2010	8:48:13 PM	Bypass valve opened
6/25/2010	8:48:13 PM	Helium MFC set to  0.000000
6/25/2010	8:48:13 PM	H2 MFC set to  0.000000
6/25/2010	8:48:13 PM	BCl3 MFC set to  0.000000
6/25/2010	8:48:13 PM	PHl3 MFC set to  0.000000
6/25/2010	8:48:13 PM	SiCl4 MFC set to  0.000000
6/25/2010	8:48:13 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	8:48:13 PM	Tube furnace set to 0
6/25/2010	8:48:14 PM	Run finished at 8:48 PM
6/25/2010	8:48:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	9:17:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	9:17:02 PM	Recipe started at 9:17 PM
6/25/2010	9:17:02 PM	H2 valve closed
6/25/2010	9:17:02 PM	BCl3 valve closed
6/25/2010	9:17:02 PM	PH3 valve closed
6/25/2010	9:17:02 PM	SiCl4 pre valve closed
6/25/2010	9:17:02 PM	SiCl4 post valve closed
6/25/2010	9:17:02 PM	Main Vac valve closed
6/25/2010	9:17:02 PM	Bypass valve closed
6/25/2010	9:17:02 PM	Bubbler valve closed
6/25/2010	9:17:02 PM	Helium valve opened
6/25/2010	9:17:02 PM	Helium MFC set to  500.000000
6/25/2010	9:17:02 PM	H2 MFC set to  0.000000
6/25/2010	9:17:02 PM	BCl3 MFC set to  0.000000
6/25/2010	9:17:02 PM	PHl3 MFC set to  0.000000
6/25/2010	9:17:02 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:17:02 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:17:02 PM	Tube furnace set to 0
6/25/2010	9:18:18 PM	Helium valve closed
6/25/2010	9:18:18 PM	H2 valve closed
6/25/2010	9:18:18 PM	BCl3 valve closed
6/25/2010	9:18:18 PM	PH3 valve closed
6/25/2010	9:18:18 PM	SiCl4 pre valve closed
6/25/2010	9:18:18 PM	SiCl4 post valve closed
6/25/2010	9:18:18 PM	Main Vac valve closed
6/25/2010	9:18:18 PM	Bypass valve closed
6/25/2010	9:18:18 PM	Bubbler valve closed
6/25/2010	9:18:18 PM	Helium MFC set to  0.000000
6/25/2010	9:18:18 PM	H2 MFC set to  0.000000
6/25/2010	9:18:18 PM	BCl3 MFC set to  0.000000
6/25/2010	9:18:18 PM	PHl3 MFC set to  0.000000
6/25/2010	9:18:18 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:18:18 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:18:18 PM	Tube furnace set to 0
6/25/2010	9:18:18 PM	Run finished at 9:18 PM
6/25/2010	9:18:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/25/2010	9:20:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	9:20:07 PM	Recipe started at 9:20 PM
6/25/2010	9:20:07 PM	Helium valve closed
6/25/2010	9:20:07 PM	H2 valve closed
6/25/2010	9:20:07 PM	BCl3 valve closed
6/25/2010	9:20:07 PM	PH3 valve closed
6/25/2010	9:20:07 PM	SiCl4 pre valve closed
6/25/2010	9:20:07 PM	SiCl4 post valve closed
6/25/2010	9:20:07 PM	Main Vac valve closed
6/25/2010	9:20:07 PM	Bubbler valve closed
6/25/2010	9:20:07 PM	Bypass valve opened
6/25/2010	9:20:07 PM	Helium MFC set to  0.000000
6/25/2010	9:20:07 PM	H2 MFC set to  0.000000
6/25/2010	9:20:07 PM	BCl3 MFC set to  0.000000
6/25/2010	9:20:07 PM	PHl3 MFC set to  0.000000
6/25/2010	9:20:07 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:20:07 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:20:07 PM	Tube furnace set to 0
6/25/2010	9:20:51 PM	Helium valve closed
6/25/2010	9:20:51 PM	H2 valve closed
6/25/2010	9:20:51 PM	BCl3 valve closed
6/25/2010	9:20:51 PM	PH3 valve closed
6/25/2010	9:20:51 PM	SiCl4 pre valve closed
6/25/2010	9:20:51 PM	SiCl4 post valve closed
6/25/2010	9:20:51 PM	Bubbler valve closed
6/25/2010	9:20:51 PM	Main Vac valve opened
6/25/2010	9:20:51 PM	Bypass valve opened
6/25/2010	9:20:51 PM	Helium MFC set to  0.000000
6/25/2010	9:20:51 PM	H2 MFC set to  0.000000
6/25/2010	9:20:51 PM	BCl3 MFC set to  0.000000
6/25/2010	9:20:51 PM	PHl3 MFC set to  0.000000
6/25/2010	9:20:51 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:20:51 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:20:51 PM	Tube furnace set to 0
6/25/2010	9:20:51 PM	Run finished at 9:20 PM
6/25/2010	9:20:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	9:24:03 PM	Helium valve opened
6/25/2010	9:24:05 PM	Helium MFC set to  100.000000
6/25/2010	9:29:46 PM	Helium valve closed
6/25/2010	9:30:21 PM	Helium valve opened
6/25/2010	9:42:28 PM	Helium MFC set to  0.000000
6/25/2010	9:42:29 PM	Helium valve closed
6/25/2010	9:43:48 PM	Bypass valve closed
6/25/2010	9:43:48 PM	Main Vac valve closed
6/25/2010	9:43:54 PM	Main Vac valve opened
6/25/2010	9:43:54 PM	Bypass valve opened
6/25/2010	9:44:53 PM	Recipe started at 9:44 PM
6/25/2010	9:44:53 PM	Helium valve closed
6/25/2010	9:44:53 PM	BCl3 valve closed
6/25/2010	9:44:53 PM	PH3 valve closed
6/25/2010	9:44:53 PM	SiCl4 pre valve closed
6/25/2010	9:44:53 PM	SiCl4 post valve closed
6/25/2010	9:44:53 PM	Main Vac valve closed
6/25/2010	9:44:53 PM	Bypass valve closed
6/25/2010	9:44:53 PM	Bubbler valve closed
6/25/2010	9:44:53 PM	H2 valve opened
6/25/2010	9:44:53 PM	Helium MFC set to  0.000000
6/25/2010	9:44:53 PM	H2 MFC set to  500.000000
6/25/2010	9:44:53 PM	BCl3 MFC set to  0.000000
6/25/2010	9:44:53 PM	PHl3 MFC set to  0.000000
6/25/2010	9:44:53 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:44:53 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:44:53 PM	Tube furnace set to 0
6/25/2010	9:46:13 PM	Helium valve closed
6/25/2010	9:46:13 PM	BCl3 valve closed
6/25/2010	9:46:13 PM	PH3 valve closed
6/25/2010	9:46:13 PM	SiCl4 pre valve closed
6/25/2010	9:46:13 PM	SiCl4 post valve closed
6/25/2010	9:46:13 PM	Main Vac valve closed
6/25/2010	9:46:13 PM	Bypass valve closed
6/25/2010	9:46:13 PM	H2 valve opened
6/25/2010	9:46:13 PM	Bubbler valve opened
6/25/2010	9:46:13 PM	Helium MFC set to  0.000000
6/25/2010	9:46:13 PM	H2 MFC set to  500.000000
6/25/2010	9:46:13 PM	BCl3 MFC set to  0.000000
6/25/2010	9:46:13 PM	PHl3 MFC set to  0.000000
6/25/2010	9:46:13 PM	SiCl4 MFC set to  0.000000
6/25/2010	9:46:13 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:46:13 PM	Tube furnace set to 1000
6/25/2010	9:54:35 PM	Helium valve closed
6/25/2010	9:54:35 PM	PH3 valve closed
6/25/2010	9:54:35 PM	Main Vac valve closed
6/25/2010	9:54:35 PM	Bypass valve closed
6/25/2010	9:54:35 PM	H2 valve opened
6/25/2010	9:54:35 PM	BCl3 valve opened
6/25/2010	9:54:35 PM	SiCl4 pre valve opened
6/25/2010	9:54:35 PM	SiCl4 post valve opened
6/25/2010	9:54:35 PM	Bubbler valve opened
6/25/2010	9:54:35 PM	Helium MFC set to  0.000000
6/25/2010	9:54:35 PM	H2 MFC set to  500.000000
6/25/2010	9:54:35 PM	BCl3 MFC set to  10.000000
6/25/2010	9:54:35 PM	PHl3 MFC set to  0.000000
6/25/2010	9:54:35 PM	SiCl4 MFC set to  50.000000
6/25/2010	9:54:35 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:54:35 PM	Tube furnace set to 1000
6/25/2010	9:57:44 PM	Helium valve closed
6/25/2010	9:57:44 PM	PH3 valve closed
6/25/2010	9:57:44 PM	Main Vac valve closed
6/25/2010	9:57:44 PM	Bypass valve closed
6/25/2010	9:57:44 PM	H2 valve opened
6/25/2010	9:57:44 PM	BCl3 valve opened
6/25/2010	9:57:44 PM	SiCl4 pre valve opened
6/25/2010	9:57:44 PM	SiCl4 post valve opened
6/25/2010	9:57:44 PM	Bubbler valve opened
6/25/2010	9:57:44 PM	Helium MFC set to  0.000000
6/25/2010	9:57:44 PM	H2 MFC set to  500.000000
6/25/2010	9:57:44 PM	BCl3 MFC set to  10.000000
6/25/2010	9:57:44 PM	PHl3 MFC set to  0.000000
6/25/2010	9:57:44 PM	SiCl4 MFC set to  50.000000
6/25/2010	9:57:44 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	9:57:44 PM	Tube furnace set to 1000
6/25/2010	10:02:44 PM	H2 valve closed
6/25/2010	10:02:44 PM	BCl3 valve closed
6/25/2010	10:02:44 PM	PH3 valve closed
6/25/2010	10:02:44 PM	SiCl4 pre valve closed
6/25/2010	10:02:44 PM	SiCl4 post valve closed
6/25/2010	10:02:44 PM	Main Vac valve closed
6/25/2010	10:02:44 PM	Bypass valve closed
6/25/2010	10:02:44 PM	Helium valve opened
6/25/2010	10:02:44 PM	Bubbler valve opened
6/25/2010	10:02:44 PM	Helium MFC set to  500.000000
6/25/2010	10:02:44 PM	H2 MFC set to  0.000000
6/25/2010	10:02:44 PM	BCl3 MFC set to  0.000000
6/25/2010	10:02:44 PM	PHl3 MFC set to  0.000000
6/25/2010	10:02:44 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:02:44 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:02:44 PM	Tube furnace set to 0
6/25/2010	10:19:56 PM	Helium valve closed
6/25/2010	10:19:56 PM	H2 valve closed
6/25/2010	10:19:56 PM	BCl3 valve closed
6/25/2010	10:19:56 PM	PH3 valve closed
6/25/2010	10:19:56 PM	SiCl4 pre valve closed
6/25/2010	10:19:56 PM	SiCl4 post valve closed
6/25/2010	10:19:56 PM	Main Vac valve closed
6/25/2010	10:19:56 PM	Bypass valve closed
6/25/2010	10:19:56 PM	Bubbler valve closed
6/25/2010	10:19:56 PM	Helium MFC set to  0.000000
6/25/2010	10:19:56 PM	H2 MFC set to  0.000000
6/25/2010	10:19:56 PM	BCl3 MFC set to  0.000000
6/25/2010	10:19:56 PM	PHl3 MFC set to  0.000000
6/25/2010	10:19:56 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:19:56 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:19:56 PM	Tube furnace set to 0
6/25/2010	10:19:56 PM	Run finished at 10:19 PM
6/25/2010	10:34:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/25/2010	10:34:52 PM	Recipe started at 10:34 PM
6/25/2010	10:34:52 PM	H2 valve closed
6/25/2010	10:34:52 PM	BCl3 valve closed
6/25/2010	10:34:52 PM	PH3 valve closed
6/25/2010	10:34:52 PM	SiCl4 pre valve closed
6/25/2010	10:34:52 PM	SiCl4 post valve closed
6/25/2010	10:34:52 PM	Main Vac valve closed
6/25/2010	10:34:52 PM	Bypass valve closed
6/25/2010	10:34:52 PM	Bubbler valve closed
6/25/2010	10:34:52 PM	Helium valve opened
6/25/2010	10:34:52 PM	Helium MFC set to  500.000000
6/25/2010	10:34:52 PM	H2 MFC set to  0.000000
6/25/2010	10:34:52 PM	BCl3 MFC set to  0.000000
6/25/2010	10:34:52 PM	PHl3 MFC set to  0.000000
6/25/2010	10:34:52 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:34:52 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:34:52 PM	Tube furnace set to 0
6/25/2010	10:34:53 PM	Helium valve closed
6/25/2010	10:34:53 PM	H2 valve closed
6/25/2010	10:34:53 PM	BCl3 valve closed
6/25/2010	10:34:53 PM	PH3 valve closed
6/25/2010	10:34:53 PM	SiCl4 pre valve closed
6/25/2010	10:34:53 PM	SiCl4 post valve closed
6/25/2010	10:34:53 PM	Main Vac valve closed
6/25/2010	10:34:53 PM	Bypass valve closed
6/25/2010	10:34:53 PM	Bubbler valve closed
6/25/2010	10:34:53 PM	Helium MFC set to  0.000000
6/25/2010	10:34:53 PM	H2 MFC set to  0.000000
6/25/2010	10:34:53 PM	BCl3 MFC set to  0.000000
6/25/2010	10:34:53 PM	PHl3 MFC set to  0.000000
6/25/2010	10:34:53 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:34:53 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:34:53 PM	Tube furnace set to 0
6/25/2010	10:35:08 PM	Helium valve closed
6/25/2010	10:35:08 PM	H2 valve closed
6/25/2010	10:35:08 PM	BCl3 valve closed
6/25/2010	10:35:08 PM	PH3 valve closed
6/25/2010	10:35:08 PM	SiCl4 pre valve closed
6/25/2010	10:35:08 PM	SiCl4 post valve closed
6/25/2010	10:35:08 PM	Main Vac valve closed
6/25/2010	10:35:08 PM	Bubbler valve closed
6/25/2010	10:35:08 PM	Bypass valve opened
6/25/2010	10:35:08 PM	Helium MFC set to  0.000000
6/25/2010	10:35:08 PM	H2 MFC set to  0.000000
6/25/2010	10:35:08 PM	BCl3 MFC set to  0.000000
6/25/2010	10:35:08 PM	PHl3 MFC set to  0.000000
6/25/2010	10:35:08 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:35:08 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:35:08 PM	Tube furnace set to 0
6/25/2010	10:35:55 PM	Helium valve closed
6/25/2010	10:35:55 PM	H2 valve closed
6/25/2010	10:35:55 PM	BCl3 valve closed
6/25/2010	10:35:55 PM	PH3 valve closed
6/25/2010	10:35:55 PM	SiCl4 pre valve closed
6/25/2010	10:35:55 PM	SiCl4 post valve closed
6/25/2010	10:35:55 PM	Bubbler valve closed
6/25/2010	10:35:55 PM	Main Vac valve opened
6/25/2010	10:35:55 PM	Bypass valve opened
6/25/2010	10:35:55 PM	Helium MFC set to  0.000000
6/25/2010	10:35:55 PM	H2 MFC set to  0.000000
6/25/2010	10:35:55 PM	BCl3 MFC set to  0.000000
6/25/2010	10:35:55 PM	PHl3 MFC set to  0.000000
6/25/2010	10:35:55 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:35:55 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:35:56 PM	Tube furnace set to 0
6/25/2010	10:40:56 PM	H2 valve closed
6/25/2010	10:40:56 PM	BCl3 valve closed
6/25/2010	10:40:56 PM	PH3 valve closed
6/25/2010	10:40:56 PM	SiCl4 pre valve closed
6/25/2010	10:40:56 PM	SiCl4 post valve closed
6/25/2010	10:40:56 PM	Main Vac valve closed
6/25/2010	10:40:56 PM	Bypass valve closed
6/25/2010	10:40:56 PM	Bubbler valve closed
6/25/2010	10:40:56 PM	Helium valve opened
6/25/2010	10:40:56 PM	Helium MFC set to  500.000000
6/25/2010	10:40:56 PM	H2 MFC set to  0.000000
6/25/2010	10:40:56 PM	BCl3 MFC set to  0.000000
6/25/2010	10:40:56 PM	PHl3 MFC set to  0.000000
6/25/2010	10:40:56 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:40:56 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:40:56 PM	Tube furnace set to 0
6/25/2010	10:42:14 PM	Helium valve closed
6/25/2010	10:42:14 PM	H2 valve closed
6/25/2010	10:42:14 PM	BCl3 valve closed
6/25/2010	10:42:14 PM	PH3 valve closed
6/25/2010	10:42:14 PM	SiCl4 pre valve closed
6/25/2010	10:42:14 PM	SiCl4 post valve closed
6/25/2010	10:42:14 PM	Main Vac valve closed
6/25/2010	10:42:14 PM	Bypass valve closed
6/25/2010	10:42:14 PM	Bubbler valve closed
6/25/2010	10:42:14 PM	Helium MFC set to  0.000000
6/25/2010	10:42:14 PM	H2 MFC set to  0.000000
6/25/2010	10:42:14 PM	BCl3 MFC set to  0.000000
6/25/2010	10:42:14 PM	PHl3 MFC set to  0.000000
6/25/2010	10:42:14 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:42:14 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:42:14 PM	Tube furnace set to 0
6/25/2010	10:42:29 PM	Helium valve closed
6/25/2010	10:42:29 PM	H2 valve closed
6/25/2010	10:42:29 PM	BCl3 valve closed
6/25/2010	10:42:29 PM	PH3 valve closed
6/25/2010	10:42:29 PM	SiCl4 pre valve closed
6/25/2010	10:42:29 PM	SiCl4 post valve closed
6/25/2010	10:42:29 PM	Main Vac valve closed
6/25/2010	10:42:29 PM	Bubbler valve closed
6/25/2010	10:42:29 PM	Bypass valve opened
6/25/2010	10:42:29 PM	Helium MFC set to  0.000000
6/25/2010	10:42:29 PM	H2 MFC set to  0.000000
6/25/2010	10:42:29 PM	BCl3 MFC set to  0.000000
6/25/2010	10:42:29 PM	PHl3 MFC set to  0.000000
6/25/2010	10:42:29 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:42:29 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:42:29 PM	Tube furnace set to 0
6/25/2010	10:43:01 PM	Helium valve closed
6/25/2010	10:43:01 PM	H2 valve closed
6/25/2010	10:43:01 PM	BCl3 valve closed
6/25/2010	10:43:01 PM	PH3 valve closed
6/25/2010	10:43:01 PM	SiCl4 pre valve closed
6/25/2010	10:43:01 PM	SiCl4 post valve closed
6/25/2010	10:43:01 PM	Bubbler valve closed
6/25/2010	10:43:01 PM	Main Vac valve opened
6/25/2010	10:43:01 PM	Bypass valve opened
6/25/2010	10:43:01 PM	Helium MFC set to  0.000000
6/25/2010	10:43:01 PM	H2 MFC set to  0.000000
6/25/2010	10:43:01 PM	BCl3 MFC set to  0.000000
6/25/2010	10:43:01 PM	PHl3 MFC set to  0.000000
6/25/2010	10:43:01 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:43:01 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:43:01 PM	Tube furnace set to 0
6/25/2010	10:48:01 PM	H2 valve closed
6/25/2010	10:48:01 PM	BCl3 valve closed
6/25/2010	10:48:01 PM	PH3 valve closed
6/25/2010	10:48:01 PM	SiCl4 pre valve closed
6/25/2010	10:48:01 PM	SiCl4 post valve closed
6/25/2010	10:48:01 PM	Main Vac valve closed
6/25/2010	10:48:01 PM	Bypass valve closed
6/25/2010	10:48:01 PM	Bubbler valve closed
6/25/2010	10:48:01 PM	Helium valve opened
6/25/2010	10:48:01 PM	Helium MFC set to  500.000000
6/25/2010	10:48:01 PM	H2 MFC set to  0.000000
6/25/2010	10:48:01 PM	BCl3 MFC set to  0.000000
6/25/2010	10:48:01 PM	PHl3 MFC set to  0.000000
6/25/2010	10:48:01 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:48:01 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:48:02 PM	Tube furnace set to 0
6/25/2010	10:49:19 PM	Helium valve closed
6/25/2010	10:49:19 PM	H2 valve closed
6/25/2010	10:49:19 PM	BCl3 valve closed
6/25/2010	10:49:19 PM	PH3 valve closed
6/25/2010	10:49:19 PM	SiCl4 pre valve closed
6/25/2010	10:49:19 PM	SiCl4 post valve closed
6/25/2010	10:49:19 PM	Main Vac valve closed
6/25/2010	10:49:19 PM	Bypass valve closed
6/25/2010	10:49:19 PM	Bubbler valve closed
6/25/2010	10:49:19 PM	Helium MFC set to  0.000000
6/25/2010	10:49:19 PM	H2 MFC set to  0.000000
6/25/2010	10:49:19 PM	BCl3 MFC set to  0.000000
6/25/2010	10:49:19 PM	PHl3 MFC set to  0.000000
6/25/2010	10:49:19 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:49:19 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:49:19 PM	Tube furnace set to 0
6/25/2010	10:49:34 PM	Helium valve closed
6/25/2010	10:49:34 PM	H2 valve closed
6/25/2010	10:49:34 PM	BCl3 valve closed
6/25/2010	10:49:34 PM	PH3 valve closed
6/25/2010	10:49:34 PM	SiCl4 pre valve closed
6/25/2010	10:49:34 PM	SiCl4 post valve closed
6/25/2010	10:49:34 PM	Main Vac valve closed
6/25/2010	10:49:34 PM	Bubbler valve closed
6/25/2010	10:49:34 PM	Bypass valve opened
6/25/2010	10:49:34 PM	Helium MFC set to  0.000000
6/25/2010	10:49:34 PM	H2 MFC set to  0.000000
6/25/2010	10:49:34 PM	BCl3 MFC set to  0.000000
6/25/2010	10:49:35 PM	PHl3 MFC set to  0.000000
6/25/2010	10:49:35 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:49:35 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:49:35 PM	Tube furnace set to 0
6/25/2010	10:50:07 PM	Helium valve closed
6/25/2010	10:50:07 PM	H2 valve closed
6/25/2010	10:50:07 PM	BCl3 valve closed
6/25/2010	10:50:07 PM	PH3 valve closed
6/25/2010	10:50:07 PM	SiCl4 pre valve closed
6/25/2010	10:50:07 PM	SiCl4 post valve closed
6/25/2010	10:50:07 PM	Bubbler valve closed
6/25/2010	10:50:07 PM	Main Vac valve opened
6/25/2010	10:50:07 PM	Bypass valve opened
6/25/2010	10:50:07 PM	Helium MFC set to  0.000000
6/25/2010	10:50:07 PM	H2 MFC set to  0.000000
6/25/2010	10:50:07 PM	BCl3 MFC set to  0.000000
6/25/2010	10:50:07 PM	PHl3 MFC set to  0.000000
6/25/2010	10:50:07 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:50:07 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:50:07 PM	Tube furnace set to 0
6/25/2010	10:55:07 PM	Helium valve closed
6/25/2010	10:55:07 PM	H2 valve closed
6/25/2010	10:55:07 PM	BCl3 valve closed
6/25/2010	10:55:07 PM	PH3 valve closed
6/25/2010	10:55:07 PM	SiCl4 pre valve closed
6/25/2010	10:55:07 PM	SiCl4 post valve closed
6/25/2010	10:55:07 PM	Bubbler valve closed
6/25/2010	10:55:07 PM	Main Vac valve opened
6/25/2010	10:55:07 PM	Bypass valve opened
6/25/2010	10:55:07 PM	Helium MFC set to  0.000000
6/25/2010	10:55:07 PM	H2 MFC set to  0.000000
6/25/2010	10:55:07 PM	BCl3 MFC set to  0.000000
6/25/2010	10:55:07 PM	PHl3 MFC set to  0.000000
6/25/2010	10:55:07 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:55:07 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:55:07 PM	Tube furnace set to 0
6/25/2010	10:55:08 PM	Run finished at 10:55 PM
6/25/2010	10:55:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/25/2010	10:55:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:55:50 PM	Recipe started at 10:55 PM
6/25/2010	10:55:50 PM	Helium valve closed
6/25/2010	10:55:50 PM	H2 valve closed
6/25/2010	10:55:50 PM	BCl3 valve closed
6/25/2010	10:55:50 PM	PH3 valve closed
6/25/2010	10:55:50 PM	SiCl4 pre valve closed
6/25/2010	10:55:50 PM	SiCl4 post valve closed
6/25/2010	10:55:50 PM	Main Vac valve closed
6/25/2010	10:55:50 PM	Bubbler valve closed
6/25/2010	10:55:50 PM	Bypass valve opened
6/25/2010	10:55:50 PM	Helium MFC set to  0.000000
6/25/2010	10:55:50 PM	H2 MFC set to  0.000000
6/25/2010	10:55:50 PM	BCl3 MFC set to  0.000000
6/25/2010	10:55:50 PM	PHl3 MFC set to  0.000000
6/25/2010	10:55:50 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:55:50 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:55:50 PM	Tube furnace set to 0
6/25/2010	10:55:50 PM	Helium valve closed
6/25/2010	10:55:50 PM	H2 valve closed
6/25/2010	10:55:50 PM	BCl3 valve closed
6/25/2010	10:55:50 PM	PH3 valve closed
6/25/2010	10:55:50 PM	SiCl4 pre valve closed
6/25/2010	10:55:50 PM	SiCl4 post valve closed
6/25/2010	10:55:50 PM	Bubbler valve closed
6/25/2010	10:55:50 PM	Main Vac valve opened
6/25/2010	10:55:50 PM	Bypass valve opened
6/25/2010	10:55:50 PM	Helium MFC set to  0.000000
6/25/2010	10:55:50 PM	H2 MFC set to  0.000000
6/25/2010	10:55:50 PM	BCl3 MFC set to  0.000000
6/25/2010	10:55:50 PM	PHl3 MFC set to  0.000000
6/25/2010	10:55:50 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:55:50 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:55:50 PM	Tube furnace set to 0
6/25/2010	10:55:50 PM	Run finished at 10:55 PM
6/25/2010	10:55:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:56:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:56:02 PM	Recipe started at 10:56 PM
6/25/2010	10:56:02 PM	Helium valve closed
6/25/2010	10:56:02 PM	H2 valve closed
6/25/2010	10:56:02 PM	BCl3 valve closed
6/25/2010	10:56:02 PM	PH3 valve closed
6/25/2010	10:56:02 PM	SiCl4 pre valve closed
6/25/2010	10:56:02 PM	SiCl4 post valve closed
6/25/2010	10:56:02 PM	Main Vac valve closed
6/25/2010	10:56:02 PM	Bubbler valve closed
6/25/2010	10:56:02 PM	Bypass valve opened
6/25/2010	10:56:02 PM	Helium MFC set to  0.000000
6/25/2010	10:56:02 PM	H2 MFC set to  0.000000
6/25/2010	10:56:02 PM	BCl3 MFC set to  0.000000
6/25/2010	10:56:02 PM	PHl3 MFC set to  0.000000
6/25/2010	10:56:02 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:56:02 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:56:02 PM	Tube furnace set to 0
6/25/2010	10:56:02 PM	Helium valve closed
6/25/2010	10:56:02 PM	H2 valve closed
6/25/2010	10:56:02 PM	BCl3 valve closed
6/25/2010	10:56:02 PM	PH3 valve closed
6/25/2010	10:56:02 PM	SiCl4 pre valve closed
6/25/2010	10:56:02 PM	SiCl4 post valve closed
6/25/2010	10:56:02 PM	Bubbler valve closed
6/25/2010	10:56:02 PM	Main Vac valve opened
6/25/2010	10:56:02 PM	Bypass valve opened
6/25/2010	10:56:02 PM	Helium MFC set to  0.000000
6/25/2010	10:56:03 PM	H2 MFC set to  0.000000
6/25/2010	10:56:03 PM	BCl3 MFC set to  0.000000
6/25/2010	10:56:03 PM	PHl3 MFC set to  0.000000
6/25/2010	10:56:03 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:56:03 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:56:03 PM	Tube furnace set to 0
6/25/2010	10:56:03 PM	Run finished at 10:56 PM
6/25/2010	10:56:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:56:06 PM	Helium valve opened
6/25/2010	10:56:11 PM	Helium MFC set to  100.000000
6/25/2010	10:56:55 PM	Helium MFC set to  0.000000
6/25/2010	10:56:58 PM	Helium valve closed
6/25/2010	10:56:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	10:57:00 PM	Recipe started at 10:56 PM
6/25/2010	10:57:00 PM	Helium valve closed
6/25/2010	10:57:00 PM	H2 valve closed
6/25/2010	10:57:00 PM	BCl3 valve closed
6/25/2010	10:57:00 PM	PH3 valve closed
6/25/2010	10:57:00 PM	SiCl4 pre valve closed
6/25/2010	10:57:00 PM	SiCl4 post valve closed
6/25/2010	10:57:00 PM	Main Vac valve closed
6/25/2010	10:57:00 PM	Bubbler valve closed
6/25/2010	10:57:00 PM	Bypass valve opened
6/25/2010	10:57:00 PM	Helium MFC set to  0.000000
6/25/2010	10:57:00 PM	H2 MFC set to  0.000000
6/25/2010	10:57:00 PM	BCl3 MFC set to  0.000000
6/25/2010	10:57:00 PM	PHl3 MFC set to  0.000000
6/25/2010	10:57:00 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:57:00 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:57:00 PM	Tube furnace set to 0
6/25/2010	10:57:00 PM	Helium valve closed
6/25/2010	10:57:00 PM	H2 valve closed
6/25/2010	10:57:00 PM	BCl3 valve closed
6/25/2010	10:57:00 PM	PH3 valve closed
6/25/2010	10:57:00 PM	SiCl4 pre valve closed
6/25/2010	10:57:00 PM	SiCl4 post valve closed
6/25/2010	10:57:00 PM	Bubbler valve closed
6/25/2010	10:57:00 PM	Main Vac valve opened
6/25/2010	10:57:00 PM	Bypass valve opened
6/25/2010	10:57:00 PM	Helium MFC set to  0.000000
6/25/2010	10:57:00 PM	H2 MFC set to  0.000000
6/25/2010	10:57:00 PM	BCl3 MFC set to  0.000000
6/25/2010	10:57:00 PM	PHl3 MFC set to  0.000000
6/25/2010	10:57:00 PM	SiCl4 MFC set to  0.000000
6/25/2010	10:57:00 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	10:57:00 PM	Tube furnace set to 0
6/25/2010	10:57:00 PM	Run finished at 10:57 PM
6/25/2010	10:57:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:00:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:00:03 PM	Recipe started at 11:00 PM
6/25/2010	11:00:03 PM	Helium valve closed
6/25/2010	11:00:03 PM	H2 valve closed
6/25/2010	11:00:03 PM	BCl3 valve closed
6/25/2010	11:00:03 PM	PH3 valve closed
6/25/2010	11:00:03 PM	SiCl4 pre valve closed
6/25/2010	11:00:03 PM	SiCl4 post valve closed
6/25/2010	11:00:03 PM	Main Vac valve closed
6/25/2010	11:00:03 PM	Bubbler valve closed
6/25/2010	11:00:03 PM	Bypass valve opened
6/25/2010	11:00:03 PM	Helium MFC set to  0.000000
6/25/2010	11:00:03 PM	H2 MFC set to  0.000000
6/25/2010	11:00:03 PM	BCl3 MFC set to  0.000000
6/25/2010	11:00:03 PM	PHl3 MFC set to  0.000000
6/25/2010	11:00:03 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:00:03 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:00:03 PM	Tube furnace set to 0
6/25/2010	11:00:03 PM	Helium valve closed
6/25/2010	11:00:03 PM	H2 valve closed
6/25/2010	11:00:03 PM	BCl3 valve closed
6/25/2010	11:00:03 PM	PH3 valve closed
6/25/2010	11:00:03 PM	SiCl4 pre valve closed
6/25/2010	11:00:03 PM	SiCl4 post valve closed
6/25/2010	11:00:03 PM	Bubbler valve closed
6/25/2010	11:00:03 PM	Main Vac valve opened
6/25/2010	11:00:03 PM	Bypass valve opened
6/25/2010	11:00:03 PM	Helium MFC set to  0.000000
6/25/2010	11:00:03 PM	H2 MFC set to  0.000000
6/25/2010	11:00:03 PM	BCl3 MFC set to  0.000000
6/25/2010	11:00:03 PM	PHl3 MFC set to  0.000000
6/25/2010	11:00:03 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:00:03 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:00:03 PM	Tube furnace set to 0
6/25/2010	11:00:03 PM	Run finished at 11:00 PM
6/25/2010	11:00:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:00:36 PM	Helium MFC set to  100.000000
6/25/2010	11:00:37 PM	Helium valve opened
6/25/2010	11:02:54 PM	Helium MFC set to  100.000000
6/25/2010	11:02:55 PM	Helium valve closed
6/25/2010	11:02:58 PM	Helium MFC set to  0.000000
6/25/2010	11:03:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:03:06 PM	Recipe started at 11:03 PM
6/25/2010	11:03:06 PM	Helium valve closed
6/25/2010	11:03:06 PM	H2 valve closed
6/25/2010	11:03:06 PM	BCl3 valve closed
6/25/2010	11:03:06 PM	PH3 valve closed
6/25/2010	11:03:06 PM	SiCl4 pre valve closed
6/25/2010	11:03:06 PM	SiCl4 post valve closed
6/25/2010	11:03:06 PM	Main Vac valve closed
6/25/2010	11:03:06 PM	Bubbler valve closed
6/25/2010	11:03:06 PM	Bypass valve opened
6/25/2010	11:03:06 PM	Helium MFC set to  0.000000
6/25/2010	11:03:06 PM	H2 MFC set to  0.000000
6/25/2010	11:03:06 PM	BCl3 MFC set to  0.000000
6/25/2010	11:03:06 PM	PHl3 MFC set to  0.000000
6/25/2010	11:03:06 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:03:06 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:03:06 PM	Tube furnace set to 0
6/25/2010	11:03:07 PM	Helium valve closed
6/25/2010	11:03:07 PM	H2 valve closed
6/25/2010	11:03:07 PM	BCl3 valve closed
6/25/2010	11:03:07 PM	PH3 valve closed
6/25/2010	11:03:07 PM	SiCl4 pre valve closed
6/25/2010	11:03:07 PM	SiCl4 post valve closed
6/25/2010	11:03:07 PM	Bubbler valve closed
6/25/2010	11:03:07 PM	Main Vac valve opened
6/25/2010	11:03:07 PM	Bypass valve opened
6/25/2010	11:03:07 PM	Helium MFC set to  0.000000
6/25/2010	11:03:07 PM	H2 MFC set to  0.000000
6/25/2010	11:03:07 PM	BCl3 MFC set to  0.000000
6/25/2010	11:03:07 PM	PHl3 MFC set to  0.000000
6/25/2010	11:03:07 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:03:07 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:03:07 PM	Tube furnace set to 0
6/25/2010	11:03:07 PM	Run finished at 11:03 PM
6/25/2010	11:03:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:03:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:03:54 PM	Recipe started at 11:03 PM
6/25/2010	11:03:54 PM	Helium valve closed
6/25/2010	11:03:54 PM	H2 valve closed
6/25/2010	11:03:54 PM	BCl3 valve closed
6/25/2010	11:03:54 PM	PH3 valve closed
6/25/2010	11:03:54 PM	SiCl4 pre valve closed
6/25/2010	11:03:54 PM	SiCl4 post valve closed
6/25/2010	11:03:54 PM	Main Vac valve closed
6/25/2010	11:03:54 PM	Bubbler valve closed
6/25/2010	11:03:54 PM	Bypass valve opened
6/25/2010	11:03:54 PM	Helium MFC set to  0.000000
6/25/2010	11:03:54 PM	H2 MFC set to  0.000000
6/25/2010	11:03:54 PM	BCl3 MFC set to  0.000000
6/25/2010	11:03:54 PM	PHl3 MFC set to  0.000000
6/25/2010	11:03:54 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:03:54 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:03:55 PM	Tube furnace set to 0
6/25/2010	11:03:55 PM	Helium valve closed
6/25/2010	11:03:55 PM	H2 valve closed
6/25/2010	11:03:55 PM	BCl3 valve closed
6/25/2010	11:03:55 PM	PH3 valve closed
6/25/2010	11:03:55 PM	SiCl4 pre valve closed
6/25/2010	11:03:55 PM	SiCl4 post valve closed
6/25/2010	11:03:55 PM	Bubbler valve closed
6/25/2010	11:03:55 PM	Main Vac valve opened
6/25/2010	11:03:55 PM	Bypass valve opened
6/25/2010	11:03:55 PM	Helium MFC set to  0.000000
6/25/2010	11:03:55 PM	H2 MFC set to  0.000000
6/25/2010	11:03:55 PM	BCl3 MFC set to  0.000000
6/25/2010	11:03:55 PM	PHl3 MFC set to  0.000000
6/25/2010	11:03:55 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:03:55 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:03:55 PM	Tube furnace set to 0
6/25/2010	11:03:55 PM	Run finished at 11:03 PM
6/25/2010	11:03:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:04:13 PM	Helium MFC set to  100.000000
6/25/2010	11:04:15 PM	Helium valve opened
6/25/2010	11:12:22 PM	Helium valve closed
6/25/2010	11:12:25 PM	Helium MFC set to  0.000000
6/25/2010	11:13:27 PM	Helium MFC set to  100.000000
6/25/2010	11:13:29 PM	Helium valve opened
6/25/2010	11:19:04 PM	Helium valve closed
6/25/2010	11:19:08 PM	Helium MFC set to  0.000000
6/25/2010	11:20:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:20:52 PM	Recipe started at 11:20 PM
6/25/2010	11:20:52 PM	Helium valve closed
6/25/2010	11:20:52 PM	H2 valve closed
6/25/2010	11:20:52 PM	BCl3 valve closed
6/25/2010	11:20:52 PM	PH3 valve closed
6/25/2010	11:20:52 PM	SiCl4 pre valve closed
6/25/2010	11:20:52 PM	SiCl4 post valve closed
6/25/2010	11:20:52 PM	Main Vac valve closed
6/25/2010	11:20:52 PM	Bubbler valve closed
6/25/2010	11:20:52 PM	Bypass valve opened
6/25/2010	11:20:52 PM	Helium MFC set to  0.000000
6/25/2010	11:20:52 PM	H2 MFC set to  0.000000
6/25/2010	11:20:52 PM	BCl3 MFC set to  0.000000
6/25/2010	11:20:52 PM	PHl3 MFC set to  0.000000
6/25/2010	11:20:52 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:20:52 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:20:52 PM	Tube furnace set to 0
6/25/2010	11:20:52 PM	Helium valve closed
6/25/2010	11:20:52 PM	H2 valve closed
6/25/2010	11:20:52 PM	BCl3 valve closed
6/25/2010	11:20:52 PM	PH3 valve closed
6/25/2010	11:20:52 PM	SiCl4 pre valve closed
6/25/2010	11:20:52 PM	SiCl4 post valve closed
6/25/2010	11:20:52 PM	Bubbler valve closed
6/25/2010	11:20:52 PM	Main Vac valve opened
6/25/2010	11:20:52 PM	Bypass valve opened
6/25/2010	11:20:52 PM	Helium MFC set to  0.000000
6/25/2010	11:20:52 PM	H2 MFC set to  0.000000
6/25/2010	11:20:52 PM	BCl3 MFC set to  0.000000
6/25/2010	11:20:52 PM	PHl3 MFC set to  0.000000
6/25/2010	11:20:52 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:20:52 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:20:52 PM	Tube furnace set to 0
6/25/2010	11:20:52 PM	Run finished at 11:20 PM
6/25/2010	11:20:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/25/2010	11:21:12 PM	Helium MFC set to  100.000000
6/25/2010	11:21:17 PM	Helium valve opened
6/25/2010	11:27:06 PM	Helium valve closed
6/25/2010	11:27:10 PM	Helium MFC set to  0.000000
6/25/2010	11:28:18 PM	Helium MFC set to  100.000000
6/25/2010	11:28:24 PM	Helium valve opened
6/25/2010	11:35:26 PM	Helium valve closed
6/25/2010	11:35:29 PM	Helium MFC set to  0.000000
6/25/2010	11:36:29 PM	Bypass valve closed
6/25/2010	11:36:30 PM	Main Vac valve closed
6/25/2010	11:36:40 PM	Bypass valve opened
6/25/2010	11:36:40 PM	Main Vac valve opened
6/25/2010	11:37:13 PM	Helium MFC set to  100.000000
6/25/2010	11:37:21 PM	Helium valve opened
6/25/2010	11:44:34 PM	Helium valve closed
6/25/2010	11:44:37 PM	Helium MFC set to  0.000000
6/25/2010	11:45:37 PM	Helium MFC set to  100.000000
6/25/2010	11:45:38 PM	Helium valve opened
6/25/2010	11:46:59 PM	Helium valve closed
6/25/2010	11:47:02 PM	Helium MFC set to  0.000000
6/25/2010	11:48:17 PM	Recipe started at 11:48 PM
6/25/2010	11:48:17 PM	Helium valve closed
6/25/2010	11:48:17 PM	BCl3 valve closed
6/25/2010	11:48:17 PM	PH3 valve closed
6/25/2010	11:48:17 PM	SiCl4 pre valve closed
6/25/2010	11:48:17 PM	SiCl4 post valve closed
6/25/2010	11:48:17 PM	Main Vac valve closed
6/25/2010	11:48:17 PM	Bypass valve closed
6/25/2010	11:48:17 PM	Bubbler valve closed
6/25/2010	11:48:17 PM	H2 valve opened
6/25/2010	11:48:17 PM	Helium MFC set to  0.000000
6/25/2010	11:48:17 PM	H2 MFC set to  500.000000
6/25/2010	11:48:17 PM	BCl3 MFC set to  0.000000
6/25/2010	11:48:17 PM	PHl3 MFC set to  0.000000
6/25/2010	11:48:17 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:48:17 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:48:17 PM	Tube furnace set to 0
6/25/2010	11:49:36 PM	Helium valve closed
6/25/2010	11:49:36 PM	BCl3 valve closed
6/25/2010	11:49:36 PM	PH3 valve closed
6/25/2010	11:49:36 PM	SiCl4 pre valve closed
6/25/2010	11:49:36 PM	SiCl4 post valve closed
6/25/2010	11:49:36 PM	Main Vac valve closed
6/25/2010	11:49:36 PM	Bypass valve closed
6/25/2010	11:49:36 PM	H2 valve opened
6/25/2010	11:49:36 PM	Bubbler valve opened
6/25/2010	11:49:36 PM	Helium MFC set to  0.000000
6/25/2010	11:49:36 PM	H2 MFC set to  500.000000
6/25/2010	11:49:36 PM	BCl3 MFC set to  0.000000
6/25/2010	11:49:36 PM	PHl3 MFC set to  0.000000
6/25/2010	11:49:36 PM	SiCl4 MFC set to  0.000000
6/25/2010	11:49:36 PM	Bypass solenoid MFC set to  0.000000
6/25/2010	11:49:37 PM	Tube furnace set to 1000
